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Display device and method for manufacturing display device

A technology for a display device and a manufacturing method, which is applied to lighting devices, electrical components, circuits, etc., can solve problems such as low pass rate, low production efficiency, and increased manufacturing cost, and achieve the effects of increased pass rate and improved production performance

Inactive Publication Date: 2007-02-21
SONY CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0009] However, with the above-mentioned method of Patent Document 1, misregistration of the mask opening to the auxiliary wiring and deviation of the laser irradiation position with respect to the auxiliary wiring tend to occur, which are the main causes of a decrease in the yield.
In addition, in particular, the method using a mask increases the manufacturing cost due to the use of the mask
In addition, since the method of irradiating the laser line in alignment with the auxiliary wiring position takes more processing time than irradiating the laser at one time, the production efficiency is low.

Method used

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  • Display device and method for manufacturing display device
  • Display device and method for manufacturing display device
  • Display device and method for manufacturing display device

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Experimental program
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no. 1 approach

[0037] figure 1 It is a plan schematic diagram for explaining the structure of the display apparatus 1 of this 1st Embodiment. The display device 1 shown in this figure is an active matrix driven display device, and is formed by arranging a plurality of organic electroluminescence elements EL corresponding to each pixel a on a substrate 2 . In addition, between the pixels a-a, auxiliary wiring connected to the organic electroluminescent element EL is provided as follows.

[0038] figure 2 is a schematic cross-sectional view for explaining the structure of the display device 1 according to the first embodiment, and corresponds to figure 1 The A-A' profile.

[0039] like figure 2 As shown, a pixel circuit including a thin film transistor Tr and a capacitive element not shown here is provided on a substrate 2 , and an interlayer insulating film 3 is provided in a state covering the pixel circuit. Simultaneously, on this interlayer insulating film 3, a structure for disposi...

no. 2 approach

[0069] FIG. 6 is a schematic cross-sectional view illustrating the configuration of a display device 1' shown in the second embodiment. The Figure 6 is equivalent to the previous figure 1 The A-A' profile. and Figure 6A The display device 1 ′ of the second embodiment shown is different from the display device 1 described in the first embodiment in the configuration of the auxiliary wiring N′, and the other configurations are the same.

[0070] That is, the auxiliary wiring N' on the display device 1' is composed only of a light absorbing layer made of a material that has a higher light absorption rate than the lower electrode 4 and has a higher light-to-heat conversion efficiency.

[0071] Furthermore, in the manufacture of the display device 1' constituted in this way, as Figure 6B As shown, the steps up to the formation of the interlayer insulating film 3 are performed in the same manner as in the first embodiment, and then the auxiliary wiring N' and the lower electrod...

no. 3 approach

[0075] Fig. 7 is a schematic cross-sectional view for explaining the structure of a display device 1" of the third embodiment. This Fig. 7 corresponds to the previous figure 1 The A-A' profile. and Figure 7A The display device 1 ″ of the third embodiment shown is different from the display device 1 described in the first embodiment in the structure of the auxiliary wiring N ″, and the other structures are the same.

[0076] That is, in the auxiliary wiring N" on the display device 1", the high conductive layer 8 made of the same material as the lower electrode 4 is provided on the upper layer of the light absorbing layer 9, and the light is exposed from the removed part of the high conductive layer 8. Structure of the absorbent layer 9 .

[0077] In the manufacture of the display device 1" thus constituted, as Figure 7B As shown, the steps up to the formation of the interlayer insulating film 3 are carried out in the same manner as in the previous first embodiment. After ...

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Abstract

The invention realtes to a display device and a manufacturing method thereof. The manufacturing method equipped with an organic electroluminescent element in which collective removal of organic layers formed on an auxiliary wiring in high precision is possible, and by this, yield improvement and productivity improvement can be achieved, and provide the display device obtained by this. The lower part electrode 4 is pattern-formed at respective pixels a on a substrate 2. An auxiliary wiring N with a constitution that is provided with a light-absorbing layer 9 composed of a conductive material having a higher light absorbance than that of the lower part electrode 4 is formed between respective pixels a. An organic layer 5 is formed in a state covering the lower part electrode on the substrate at which the lower electrode and the auxiliary wiring N have been formed. Laser beam is converted into heat at the light absorbing layer exposed to the lower part of the organic layer by irradiation of the laser beam from the organic layer side, and the organic layer part on the upper part of the light absorbing layer is selectively removed. The organic layer is made to be pinched between the lower part electrode, and on the light absorbing layer part where the organic layer has been removed, the upper part electrode 6 connected to the auxiliary wiring N is formed on the substrate.

Description

technical field [0001] The present invention relates to a manufacturing method of a display device and a display device, in particular to a manufacturing method of a display device formed by arranging a plurality of organic electroluminescence elements, and a display device obtained by the method. technical background [0002] An organic electroluminescent element (often referred to simply as an organic electroluminescent element) utilizing electroluminescence (EL) of an organic material, in which an organic layer such as a hole transport layer and a light emitting layer is interposed between a lower electrode and an upper electrode. As a result, it has attracted attention as a light-emitting element that can emit light with high brightness driven by low-voltage direct current. Therefore, a display device using such an organic electroluminescent element (hereinafter referred to as a display device) is actively expanding its screen size as an excellent flat-panel display devi...

Claims

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Application Information

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IPC IPC(8): H05B33/02H05B33/10
CPCH01L27/1248H01L27/3244H01L27/1214H01L2251/5315H01L27/12H01L51/0013H01L51/5228H01L51/5284H01L27/124H01L51/56H01L51/5234H10K71/18H10K2102/3026H10K59/80524H10K59/1315H10K59/8792H10K59/80522H10K50/824H10K50/828H10K50/865H10K59/12H10K71/00
Inventor 中山彻生芝崎孝宜小泽信夫松田英介平野贵之石桥义塘洋一松尾圭介
Owner SONY CORP
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