Coating apparatus, organic material thin film forming method and organic el panel manufacturing apparatus
A coating device and organic material technology, applied to the surface coating liquid device, printing device, lighting device, etc., can solve the problems of violating space saving and high cost, and achieve the effect of shortening the working time
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 Reference numeral 1 in FIG. 1 denotes a coating apparatus of a first example of the present invention.
 The coating apparatus 1 has a coating station 12 . The coating table 12 is provided with a substrate conveying mechanism 13 , and by the operation of the substrate conveying mechanism 13 , the coating object 14 placed on the coating table 12 can be moved along the longitudinal direction of the coating table 12 from The movement source A side of the coating table 12 moves toward the movement destination B. That is, during the movement of the coating object 14, the movement source A is the upstream side, and the movement destination B is the downstream side.
 A head moving mechanism 23 is arranged above the coating table 12 , and a movable head 15 is attached to the head moving mechanism 23 . By the operation of the head moving mechanism 23 , the head 15 can be reciprocated in a direction substantially perpendicular to the moving direction of the coati...
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