Coating apparatus, organic material thin film forming method and organic el panel manufacturing apparatus

A coating device and organic material technology, applied to the surface coating liquid device, printing device, lighting device, etc., can solve the problems of violating space saving and high cost, and achieve the effect of shortening the working time

Inactive Publication Date: 2007-03-28
ULVAC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0013] An apparatus for forming an organic thin film using an inkjet printer as described above is described in the following documents, but the following organic

Method used

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  • Coating apparatus, organic material thin film forming method and organic el panel manufacturing apparatus
  • Coating apparatus, organic material thin film forming method and organic el panel manufacturing apparatus
  • Coating apparatus, organic material thin film forming method and organic el panel manufacturing apparatus

Examples

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Example Embodiment

[0047] Reference numeral 1 in FIG. 1 denotes a coating apparatus of a first example of the present invention.

[0048] The coating apparatus 1 has a coating station 12 . The coating table 12 is provided with a substrate conveying mechanism 13 , and by the operation of the substrate conveying mechanism 13 , the coating object 14 placed on the coating table 12 can be moved along the longitudinal direction of the coating table 12 from The movement source A side of the coating table 12 moves toward the movement destination B. That is, during the movement of the coating object 14, the movement source A is the upstream side, and the movement destination B is the downstream side.

[0049] A head moving mechanism 23 is arranged above the coating table 12 , and a movable head 15 is attached to the head moving mechanism 23 . By the operation of the head moving mechanism 23 , the head 15 can be reciprocated in a direction substantially perpendicular to the moving direction of the coati...

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Abstract

A coating apparatus which does not require a heating chamber nor a cooling chamber is provided. An object (14) to be coated moves in an X axis direction, and on the object, an ejector (31) and laser irradiation apparatuses (32a, 32b), which can reciprocate in a Y axis direction, are arranged. An organic material ejected on a part of the surface of the object (14) from the ejector (31) is irradiated with laser beams, dried or polymerized by heating, and formed into a thin film. Moving of the ejector (31) and the laser irradiation apparatuses (32a, 32b) in the Y axis direction and moving of the object (14) in the X axis direction are repeatedly performed, and a thin film made of the organic material is formed on a prescribed region of the object (14). Since coating and laser beam irradiation can be performed parallel, operation efficiency is high. Further, since the temperature of the object (14) does not become high, a cooling process is not required.

Description

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Claims

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Application Information

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Owner ULVAC INC
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