Substrate conveying device and substrate processing device containing the same
A substrate conveying and baseplate technology, which is applied in the direction of conveyors, conveyor objects, transportation and packaging, etc., can solve problems affecting the quality of substrates, poor connection, and inability to freely switch substrate conveying directions, etc., to achieve the effect of improving conveying efficiency
Active Publication Date: 2011-09-28
WEIHAI DMS OPTICAL ELECTROMECHANICAL CO LTD +1
View PDF0 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0006] However, the above-mentioned existing conveying devices all have the disadvantage of not being able to freely switch the substrate conveying direction due to the unsmooth connection between the previous process and the next process.
[0007] That is, when the received substrate is transported to the next process in the same direction, the transport operation can be carried out smoothly, but when the direction is changed to the vertical or reverse direction, an additional turning part must be arranged
[0008] However, these problems become more prominent with the trend of increasing the size of the substrate, which makes the transportation of the substrate more difficult, thereby affecting the quality of the substrate and leading to an increase in defective products.
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0020] Hereinafter, a transport device for transporting a substrate according to an embodiment of the present invention will be described in detail with reference to the drawings.
[0021] The substrate conveying device proposed by the present invention is suitable for general substrate processing lines, as follows figure 1 The stacked type substrate processing line shown is described.
[0022] Such as figure 1 As shown, the substrate processing line equipped with the substrate conveying device of the present invention includes: a frame 3; slidably installed on the rail r of the frame 3, and performs reciprocating motion between the sending side and the sending side, while supporting the substrate G and making it A transfer device (Transfer) 5 for transferring substrates that can rotate freely; a vertical transfer unit 7 on the feeding side that descends after receiving the substrate G from the transfer device 5; a processing unit 11 for processing the substrate G; installed ...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The present invention relates to a basal plate conveying device comprising a bottom plate glidingly arranged on the frame track; an upper plate arranged above the bottom plate and supporting the basal plate thereon; the connecting part of the upper plate is rotatablely connected to the bottom plate; a rotation limiting device for limiting the radius of rotation of the upper plate with a given region.
Description
technical field [0001] The present invention relates to a substrate conveying device, and more specifically, to a substrate conveying device that is structurally improved and can be easily rotated in a state of carrying a substrate, thereby improving substrate conveying efficiency. Background technique [0002] Substrates usually used for flat panel displays (FPD; Flat Panel Display), semiconductor wafers, liquid crystal displays (LCD), mask glass, etc. go through a series of processing lines, after etching, film removal, rinsing and other processes, and then are processed wash. [0003] Such a substrate processing line usually includes an inversion section for inverting substrates; a loader for receiving substrates from the inversion section and supplying them to the cleaning section; a cleaning section for sequentially cleaning foreign matter on the substrates; Drying section for drying substrates; unloader for unloading substrates. [0004] In the substrate processing l...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): B65G49/05B65G37/00B65G47/22
CPCB65G49/063B65G2249/00H01L21/67706
Inventor 崔万寿金正哲朴镐胤
Owner WEIHAI DMS OPTICAL ELECTROMECHANICAL CO LTD