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Method for diagnosing status of burn-in apparatus

An aging device and state diagnosis technology, which is applied in the direction of measuring devices, electronic circuit testing, instruments, etc.

Inactive Publication Date: 2011-03-30
ADVANTEST CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004]However, conventional burn-in devices that use heaters need to use heaters to adjust the ambient temperature around the DUT, so there is a large difference in power consumption. The problem of implementing this test for multiple DUTs simultaneously

Method used

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  • Method for diagnosing status of burn-in apparatus
  • Method for diagnosing status of burn-in apparatus
  • Method for diagnosing status of burn-in apparatus

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Experimental program
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Embodiment Construction

[0039] A burn-in device as a best mode for carrying out the present invention will be described. In addition, this invention is not limited to this embodiment.

[0040] FIG. 1 is a block diagram showing the overall overall configuration of an aging device according to an embodiment of the present invention. In FIG. 1, such a burn-in device 1 generally includes: a test control unit 10 that controls the overall burn-in test, and an equipment power supply unit that is connected to the test control unit 10 and implements output and measurement of a power supply voltage for the DUT32. 20, the temperature adjustment unit 40 connected to the test control unit 10 for temperature adjustment during the burn-in test, the measurement unit 30 that is connected to the equipment power supply unit 20 and configured with the DUT32, and the power supply 50 connected to the temperature adjustment unit 40, And a temperature control unit 60 that performs temperature control under the control of t...

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PUM

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Abstract

The invention provides a method for diagnosing the status of a burn-in apparatus, in which a heater and a temperature sensor are brought into contact with various types of devices to be measured in a burn-in test, power consumption of the heater is controlled and the temperature of the device to be measured is adjusted to perform the burn-in test. When the device to be measured, the heater and the temperature sensor are in a noncontact status, the heater and the temperature sensor are arranged, and the temperature of a temperature control block with which a coolant is brought into contact is detected by the temperature sensor, and based on the detected results, whether the temperature sensor is normal or not is diagnosed.

Description

technical field [0001] This invention relates to making a heater and a temperature sensor in contact with various tested equipment for the aging test, controlling the power consumption of the heater, and adjusting the temperature of the tested equipment, thereby performing the aging test. The method for diagnosing the state of the aging device in the aging test is described. Background technique [0002] In recent years, along with the process of increasing the speed, increasing the capacity, and increasing the number of bits of semiconductor equipment, semiconductor equipment has further shown a variety of configuration forms. For these semiconductor devices, a burn-in test of a temperature-dependent accelerated test was performed. The characteristic of the burn-in test is that the device under test (DUT: device under test) such as a semiconductor device is energized to a high temperature, and the local heat generated by the high resistance in the incomplete metal junctio...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R31/26G01R31/28G01R31/30G01R35/00
CPCG01R35/00G01R31/2872G01R31/2855G01R31/2868G01R31/3181G01R31/26
Inventor 北一三仓沢伊弘
Owner ADVANTEST CORP