Digital electronic cutting speckle interferometer

A technology of speckle interference and digital electronics, which is applied in the direction of instruments, optical testing flaws/defects, measuring devices, etc., can solve the problems of cumbersome and time-consuming measurement process, inconvenient measurement data, and difficulty in time-space phase shift, etc., to achieve uniform illumination and Adjustment, improve clarity, light path adjustment simple effect

Inactive Publication Date: 2007-06-27
NO 711 RES INST CHINA SHIPPING HEAVY IND GRP
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Problems solved by technology

However, precisely because the optical path is coaxial, it is very difficult to realize the space-time phase shift with the traditional PZT phase shifter or carrier film, so the digitization of sheared speckle has always been a difficult research point
[0004] However, since the out-of-plane displacement and gradient are often required in actual measurement, it is inconvenient to use the small-shear electronic speckle interferometer and the large-shear electronic speckle interferometer to obtain two kinds of measurement data respectively.
In addition, these two interferometers use manual actuation to achieve temporal and spatial phase shifts, making the measurement process cumbersome and time-consuming

Method used

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  • Digital electronic cutting speckle interferometer
  • Digital electronic cutting speckle interferometer
  • Digital electronic cutting speckle interferometer

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Embodiment Construction

[0032] The digital electronic shearing speckle interferometer of the present invention comprises a laser 1, a beam expander 2 positioned on the optical path of the outgoing beam of the laser 1, a shearing mirror 5 positioned on the optical path of the beam reflected from the surface of the measured object 4, a The shearing mirror driving mechanism 6 that shearing mirror is connected, is arranged on the polarizer 7 on the optical path of the light beam that emerges from shearing mirror 5, is positioned at the digitized imaging device 8 at imaging plane place, and a computer that is connected with digitalized imaging device 8 10. These components are all arranged on a horizontal base 100, and each component will be described below:

[0033] The laser 1 can be a 532nm pumped solid-state green laser with small size, high power and single-mode output, and the incident angle of the laser can be adjusted to adapt to the adjustment of the optical path. The beam expander 2 as the beam...

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Abstract

The disclosed interferometer includes a laser, a beam expanding mechanism, a shearing mirror, a driving mechanism for shearing mirror, a polarization piece, a digitalized imaging device and a computer. The shearing mirror can be replaced by large or small shearing mirror. The driving mechanism for shearing mirror includes a horizontal displacement unit and a vertical displacement unit. Stepper motors drive the shearing mirror and the polarization piece to be moved along direction parallel and perpendicular to reflected beam. Rotation of stepper motor is controlled by pulse output from computer. The invention realizes integration of large and small electronic speckle interferometers, and possesses advantages of automatic space-time phase shift, high sensitivity, and digitization.

Description

technical field [0001] The invention relates to a speckle interferometry device, in particular to a digital electronic shear speckle interferometer. Background technique [0002] Electronic Shearographic Speckle Pattern Interferometry (ESSPI) is a comprehensive technology combining computer image processing, laser and interference. The optical path of shearing electron speckle interferometry is simple, and the method only needs one beam of coherent light for illumination. The speckle field forms two misplaced speckle patterns on the imaging surface by shearing the prism to produce interference, that is, the image of the object is staggered into two images. According to the relative stagger size of the image of the measured object, electronic shear speckle interference can be divided into small shear speckle interference and large shear speckle interference. The two misplaced images still mostly overlap are called small shear, and the overlapping part is self-coherent, and ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02G01N21/88G01N21/45G02B5/02
Inventor 张熹陆鹏吴君毅夏远富艾钢曾宪友郑长江
Owner NO 711 RES INST CHINA SHIPPING HEAVY IND GRP
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