Building up diffractive optics by structured glass coating

A structured and component technology, applied in the field of optical components, can solve the problems of high cost, time-consuming, low etching rate, etc.

Inactive Publication Date: 2007-07-11
SCHOTT AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Especially for glass, only low etch rates can be achieved, which is also a time-consuming and cost-intensive process

Method used

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  • Building up diffractive optics by structured glass coating
  • Building up diffractive optics by structured glass coating
  • Building up diffractive optics by structured glass coating

Examples

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Embodiment Construction

[0067] The following first discusses Figures 1A to 1E, which illustrate, by way of cross-sectional views, the process steps involved in fabricating a structured substrate according to a first embodiment of the present invention. To produce a structured coating, first a first coating 3 is applied to the surface 2 of the substrate 1 to be coated, as shown in FIG. 1A . Preferably, substrate 1 is connected to other substrates in the die pack. Preferably, the first coating layer 3 is formed of a photoresist layer. The substrate comprises at least one material selected from the group consisting of glass, ceramics, semiconductor materials, especially silicon, semiconductor compounds, metals, metal alloys, plastics, or combinations thereof.

[0068] Figure 1B shows a cross-sectional view of the substrate after another process step. In this step, structuring has been introduced into the first coating 3 . These structurings result in a negative structuring 5 which in plan view is com...

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Abstract

The invention relates to optical parts, and in particular to a process for applying an optically active structuring (7) to a substrate (1), and also to a component produce using a process of this type. The process for applying an optically active structuring to a substrate comprises in particular photolithographic techniques and the deposition of material via physical vapor deposition processes.

Description

technical field [0001] The present invention relates generally to optical elements, and in particular to a method for applying a photoactive structuring to a substrate, a photoactive element comprising a photoactive structure, preferably a focusing structure, and a method fabricated by a method of this type s component. Background technique [0002] As an example in JP 62066204 we disclose a Fresnel lens and its manufacturing method. The lens is fabricated by successively laminating several thin films onto a substrate, resulting in a Fresnel type lens. This is a time-consuming and costly process since making the optical structure requires precise lamination in each layer without disturbing the optical properties of the resulting lens structure. [0003] DE 43 38 969 C2 discloses a method for producing inorganic diffractive elements, in particular by means of etching glass. The substrate is coated with a mask covering the areas not to be etched, said mask being resistant t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B3/08G02B5/18G03F7/00
CPCG02B5/1876G02B5/1885
Inventor 迪特里希·蒙德克劳斯·迈克尔·海莫尔
Owner SCHOTT AG
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