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Apparatus for treating objects with plasma, use of this apparatus and method of using this apparatus

a technology for treating objects and apparatus, applied in electrical apparatus, electric discharge tubes, conveyor parts, etc., can solve problems such as inability to overcome lacks, complicating equipment, and substantial time loss, and achieve the effect of fast us

Active Publication Date: 2021-01-26
COATING PLASMA IND
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The patent describes an apparatus for depositing layers of different natures on the same object. The apparatus has multiple chambers connected to different sources of gas mixtures. The invention allows for the formation of at least two plasma deposits of different natures on the surface of the object. The apparatus also includes a meshed cage to prevent untimely contact between objects and plasma. The invention also simplifies and accelerates the use of the apparatus and reduces the risk of reactive gas mixtures. The apparatus confines the gas mixtures and plasmas generated, preventing them from mixing with each other and ensuring reliable use of different layers. The confining can be physical, with minimal leakage space provided for gases in each chamber.

Problems solved by technology

This entails a substantial loss of time, in particular in the case of treating many parts.
This method has disadvantages, in particular in the case of treatments of different durations, since the slowest treatment conditions the overall speed.
The system of airlocks requires the use and the management of manipulators under vacuum which complicates the equipment.
This document does not make it possible to overcome the lacks, which are inherent with the two types of industrial solutions described hereinabove.
This method however has notable disadvantages, in particular in that it is not practical for use for three-dimensional objects.
In other terms, given that the distance between the cathode and the substrate is predefined, this method is limited to flat substrates.

Method used

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  • Apparatus for treating objects with plasma, use of this apparatus and method of using this apparatus
  • Apparatus for treating objects with plasma, use of this apparatus and method of using this apparatus
  • Apparatus for treating objects with plasma, use of this apparatus and method of using this apparatus

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first embodiment

[0066]FIGS. 1 to 9 describe a first embodiment, wherein the objects to be treated are displaced linearly, in other terms according to a movement of translation. The apparatus in accordance with the invention first comprises an enclosure, designated as a whole by the reference 10. This enclosure, of elongated shape, is substantially closed and is advantageously constantly placed under vacuum, in service. To this effect it is provided with means for placing under vacuum, which shall be described in more detail in what follows.

[0067]The enclosure 10 has thin walls, made of a conductive material or not. A sufficiently resistant material will be chosen, in order to resist being placed under vacuum in service. This will be for example a metal material, such as stainless steel or aluminum, or glass. The dimensions of this enclosure are chosen according to the hourly quantity of objects to be treated. Solely for the purposes of information, its length is between 2 and 5 meters, its width is...

second embodiment

[0105]FIGS. 10 to 13 describe a second embodiment, wherein the objects to be treated are displaced according to a movement of rotation. In these FIGS. 10 to 13, the mechanical elements similar to those of FIGS. 1 to 9 are assigned therein the same reference numbers, increased by 100.

[0106]The apparatus in accordance with this second embodiment first comprises an enclosure 110, provided with means for placing under a vacuum, shown diagrammatically and assigned the reference 111. This enclosure 110 has thin walls, similar to those of the enclosure 10. It is provided with a door 112, allowing access to its inside volume. This enclosure 110, which is of cylindrical shape, has a shape that is less elongated than the enclosure 10. Solely for the purposes of information, its length is between 0.5 and 2.0 meters, although its diameter is between 0.5 and 1.5 meters.

[0107]The enclosure is provided with a storing station 120, with a conveyor 130, as well as two plasma chambers 140 and 150. The...

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Abstract

Apparatus for treating the surface of objects with plasma, having: an enclosure; a means for placing this enclosure under vacuum; a zone for storing objects to be treated, which is called the upstream storing zone; a zone for storing treated objects, which is called the downstream storing zone; at least two plasma treatment chambers having a means for injecting an active gas mixture, a means for creating an electrical discharge and a means for confining the plasma to the volume inside the chamber; and a means for transferring between the storing zones and the chambers, characterized in that the transferring means are conveying means defining a conveying direction, and in that the various chambers are placed one behind the other, in the conveying direction, and in that the atmospheres of the various plasma treatment chambers are not hermetically sealed off from one another.

Description

TECHNICAL FIELD OF THE INVENTION[0001]The invention relates to an industrial apparatus, for the purpose of treating objects with plasma. As a non-limiting example, the latter can be in particular hollow objects, that have an inside volume delimited by a wall that has an inner face and an outer face. Such objects among others are goblets, bowls, bottles, cups, trays, jars, tubes or industrial molds.[0002]The invention relates more particularly to such an apparatus, wherein the aforementioned objects are subjected to at least two successive plasma treatments. The invention relates to all types of normal plasma treatment, among which mention can be made, in a non-limiting manner, of: cleaning, etching, activation, functionalization or deposition. By way of example, the objects treated can be covered with at least two successive layers. These two layers can be of the same nature, in which case the final deposition has a thickness that is greater than that obtained by a single deposition...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): H01J37/32H01L21/677H01L21/67
CPCH01J37/32889H01J37/32403H01J37/32669H01J37/32733H01J37/32779H01J37/32899H01L21/6715H01L21/6776H01L21/67173
Inventor VIARD, JOCELYN
Owner COATING PLASMA IND