Transfer apparatus, cleaning apparatus, chemical processing apparatus, and method for manufacturing circuit substrate

Abstract

A transfer apparatus includes a reservoir tank that stores a fluid, a supply device that supplies the fluid into the reservoir tank such that the fluid overflows from the reservoir tank, and a transfer device that transfers an object to be transferred while floating the object to be transferred on the fluid.

Description

BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a transfer apparatus, a cleaning apparatus, a chemical processing apparatus, and a method for manufacturing a circuit substrate, and more particularly, is preferably applicable to a wet processing for flexible circuit substrates. [0003] 2. Description of Related Art [0004] Relating to the conventional cleaning apparatuses, for example, there is a method for cleaning a tape substrate by jetting a cleaning liquid onto the tape substrate while transferring the tape substrate. Here, when the tape substrate is transferred, the tape substrate is supported by rollers. For this reason, the conventional cleaning apparatus applies a large tension to the tape substrate to prevent the tape substrate from slacking between the rollers so as to stably transfer the tape substrate. [0005] However, the application of a large tension to the tape substrate at the time of transferring the tape substrate ...

AI Technical Summary

Benefits of technology

[0008] Accordingly, it is an advantage of the present invention to provide a transfer apparatus, a cleaning apparatus, a chemical processing apparatus and a method for manufacturing a circuit substrate, which can prevent the transfer control from becoming complex, and can prevent the tension from increasing.

[0009] To solve the aforementioned problems, a transfer apparatus in accordance with an embodiment of the present invention includes a reservoir tank that stores fluid fluid supply unit that supplies the fluid into the reservoir tank such that the fluid overflows from the reservoir tank and a transfer device that transfers an object to be transferred while floating the object to be transferred on the fluid.

[0010] Accordingly, the object to be transferred can be transferred while sliding the object to be transferred on the fluid, such that a surface for holding the object to be transferred can be planarized. For this reason, the tension applied to the object to be transferred can be reduced, and the object to be transferred can be transferred without inflicting damage to the object to be transferred. Also, by overflowing the fluid from the reservoir tank, the object to be transferred can be transferred on the fluid, the transfer control is prevented from becoming complex, and an increase in the cost of the transfer apparatus can be prevented.

[0011] Also, a transfer apparatus in accordance with an embodiment of the present invention includes a support member that supports an object to be transferred, a fluid supply unit that supplies fluid on the support member such that the fluid flows along a transfer direction of the object to be transferred and a transfer devices that transfers the object to be transferred while floating the object to be transferred on the fluid.

[0012] Accordingly, while carrying the object to be transferred away with the fluid, the object to be transferred can be transferred, such that a surface for holding the object to be transferred can be planarized. For this reason, the tension applied to the object to be transferred can be reduced, and the object to be transferred can be transferred without inflicting damage to the object to be transferred. Also, by flowing the fluid along the transfer direction of the object to be transferred, the object to be transferred can be transferred on the fluid, the transfer control is prevented from becoming complex, and an increase in the cost of the transfer apparatus can be prevented.

[0013] Also, a cleaning apparatus in accordance with an embodiment of the present invention includes a reservoir tank that stores a cleaning liquid, a cleaning liquid supply unit that supplies a cleaning liquid into the reservoir tank such that the cleaning liquid overflows from the reservoir tank, a transfer device that transfers an object to be transferred while floating the object to be transferred on the cleaning liquid and a clean liquid jetting unit that jets a cleaning liquid on the object to be transferred that floats on the cleaning liquid.

Problems solved by technology

However, the application of a large tension to the tape substrate at the time of transferring the tape substrate causes problems in that distortions and / or bends occur in the tape substrate, and thus the quality of the tape substrate deteriorates.

In particular, when the tape substrate is wide, or the tape substrate is thin, it becomes almost impossible to apply a large tension to the tape substrate.

However, the method of rotating the rollers in a manner that the rotation speed of the rollers is synchronized with the transfer speed of the tape substrate causes problems in that the transfer control becomes complex, the structure of the transfer apparatus becomes complicated, and the cost of the transfer apparatus increases.

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