Furnaces having dual gas screens and methods for operating the same
a gas screen and dual technology, applied in the field of furnaces, can solve the problems of inability to provide a sufficiently high flow rate and insufficient seals, and achieve the effect of reducing the introduction of contaminant gases
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[0013] The present invention now will be described more fully hereinafter with reference to the accompanying drawings, in which preferred embodiments of the invention are shown. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the thickness of members, layers and regions are exaggerated for clarity. Like numbers refer to like elements throughout. It will be understood that when an element such as a member layer, region or substrate is referred to as being “on,”“connected to” or “coupled to” another element, it can be directly on, directly connected to or directly coupled to the other element, or intervening elements also may be present. In contrast, when an element is referred to as being “directly on,”“dir...
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