Stator disc for a turbomolecular pump

a technology of turbomolecular pump and stator disc, which is applied in the direction of non-positive displacement pumps, liquid fuel engines, mechanical apparatuses, etc., can solve the problems of large deformation force, large deformation degree, and high deformation degree, so as to eliminate the high deformation degree

Inactive Publication Date: 2006-12-14
PFEIFFER VACUUM GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0008] Another object of the invention is ...

Problems solved by technology

This process is time-consuming and expensive.
The drawback of the known state of the art technology consists in that in connection regions between the inner ring and the vanes or between the vanes and the outer ring, a large degree of deformation takes place.
In addition, the forces with which the necessary degree of deformation can be achieved, are very large.
This type of deformation leads to high stresses in the material which results in the distortion of the d...

Method used

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  • Stator disc for a turbomolecular pump
  • Stator disc for a turbomolecular pump
  • Stator disc for a turbomolecular pump

Examples

Experimental program
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Embodiment Construction

[0022] A turbomolecular pump 10, which is shown in FIG. 1, has a housing 11 with a flange 12 for connecting the pump 10 with a pumped-out recipient. The flange 12 contains a suction region 13. The turbomolecular pump 10 has an outlet 14 from which the compressed gas is expelled. The turbomolecular pump 10 has a rotor shaft 15 which is supported in bearings 17 and is driven, with high speed, by a drive 18. The rotor shaft 15 carries a plurality of discs 16, each carrying vanes. Stator discs 1, which are likewise provided with vanes, are arranged between the rotor discs 16 and are fixedly secured in the housing 11. The stator discs 1 are hold at a distance from each other by spacer rings 19. The pumping action produced by a rapid rotation of the rotor discs 16 and their cooperation with the stator discs 1.

[0023] The stator disc 1 according to the present invention, which is used in the turbomolecular pump 10 and a plan view of which is shown in FIG. 2, is formed of two half-discs 6 a...

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PUM

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Abstract

A stator disc for a turbomolecular pump has an inner ring (3), an outer ring (4), and a plurality of vanes (2) formed of a stator disc plane, extending between the inner and outer rings (3, 4), and having, in connection regions of the vanes with the inner and outer rings, respective radial webs (5) a circumferential width (S) of which is smaller than a vane width (T).

Description

BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a stator disc for a turbomolecular pump and having a plurality of vanes curved out of the disc plane and having their opposite ends connected with the outer and inner rings of the disc. [0003] 2. Description of the Prior Art [0004] In turbomolecular pumps rotor and stator discs are alternatively arranged, with the rotor discs being arranged on a rapidly rotatable shaft. The stator discs are fixedly secured in the pump housing. Both types of discs have vanes, and their cooperation, together with a rapid rotation, produces the pumping effect. It is known to produce the vanes of both types of discs by milling them out of solid discs. This process is time-consuming and expensive. That is why stamped stator discs are used. Such discs are disclosed, e.g., in German Laid-Open Application DE-0S 37 22 164. In the disclosed process, solid discs are stamped out of sheet metal. Then, radial slot...

Claims

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Application Information

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IPC IPC(8): F01D1/36
CPCF04D19/042F05B2230/10F04D29/542
Inventor STOLL, TOBIAS
Owner PFEIFFER VACUUM GMBH
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