Resonating element, resonator, electronic device, electronic apparatus, moving vehicle and method of manufacturing resonating element
Patent Information
- Authority / Receiving Office
- US · United States
- Patent Type
- Applications(United States)
- Current Assignee / Owner
- SEIKO EPSON CORP
- Publication Date
- 2014-10-09
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This is continuation application of U.S. application Ser. No. 13 / 587,252 filed Aug. 16, 2012 which claims priority to Japanese Patent Application Nos. 2012-131639 filed Jun. 11, 2012, 2011-182245 filed Aug. 24, 2011 and 2011-178783 filed Aug. 18, 2011, all of which are incorporated by reference herein in their entireties.BACKGROUND
[0002] 1. Technical Field
[0003] The invention relates to a resonator that excites a thickness-shear vibration mode, and more particularly, to a resonating element having a so-called inverted mesa structure, a resonator, an electronic device, and an electronic apparatus using the resonator, a moving vehicle using the resonator, and a method of manufacturing the vibrating element.
[0004] 2. Related Art
[0005] An AT-cut quartz crystal resonator which is an example of a resonator is used in various fields such as in a piezoelectric oscillator and an electronic apparatus since it excites a thickness-shear vibration mode as...