Liquid crystal display panel, array substrate and manufacturing method for thin-film transistor

Abstract

An LCD panel, an array substrate and a manufacturing method for TFT are disclosed. The method includes: providing a substrate; forming a first metal layer on the substrate, in which the first metal layer includes an aluminum metal layer, an aluminum oxide layer and a molybdenum metal layer stacked sequentially; patterning the first metal layer to form a gate electrode of a TFT; sequentially forming a gate insulation layer, a semiconductor layer and an ohmic contact layer on the gate electrode; forming a second metal layer on the ohmic contact layer; and patterning the second metal layer to form a source electrode and a drain electrode of the TFT. Hillock generated by the aluminum metal layer in a high temperature environment can be inhibited so as to avoid short-circuiting generated among the gate, the source and the drain electrodes of the TFT to ensure the display quality of an image.

Description

CROSS REFERENCE TO RELATED APPLICATIONS[0001]This is a divisional application of co-pending patent application Ser. No. 14 / 893,521, filed on Nov. 23, 2015, which is a national stage of PCT Application Number PCT / CN2015 / 075765, filed on Apr. 2, 2015, claiming foreign priority of Chinese Patent Application Number 201510136465.4, filed on Mar. 26, 2015.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]The present invention relates to liquid crystal display technology field, and more particularly to a liquid crystal display panel, an array substrate and a manufacturing method for a thin-film transistor of the both.[0004]2. Description of Related Art[0005]A Thin-Film-Transistor (TFT) is connected with a pixel electrode, and a gate electrode of the TFT is connected with a gate line of a liquid crystal display panel in order to turn on the TFT, when the gate electrode receives a gate driving signal. A source electrode of the TFT is connected with a data line of the liquid cry...

AI Technical Summary

Benefits of technology

The present invention provides a liquid crystal display panel, array substrate and a manufacturing method for a thin film transistor that can prevent the deformation of the aluminum metal layer in a high temperature environment, thereby improving the display quality of an image. This is achieved by adding an aluminum oxide layer in the manufacturing process, which increases the melting point and hardness of aluminum, and inhibits the formation of hillock, reducing the risk of short circuits between the gate electrode, source electrode and drain electrode of the thin film transistor.

Problems solved by technology

), and a high temperature environment required in the manufacturing process makes atoms of the aluminum metal layer to be extruded with each other so that the aluminum metal layer may easily generate a hillock because of deformation caused by the extruding.

When the hillock is serious, short-circuiting will be generated among the gate electrode, a source electrode and a drain electrode of the TFT, affecting image display quality of the liquid crystal display panel.

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