Dressing board, use method of dressing board, and cutting apparatus

Abstract

A dressing board having, on a surface, a two-dimensional code including information relating to properties of the dressing board and a barcode including identification information associated with the information relating to the properties is provided. Furthermore, there is provided a cutting apparatus including a determining part that determines whether or not the properties of the dressing board read out from an information registration part based on the identification information match the kind of dressing board suitable for dressing of a cutting blade.

Description

BACKGROUND OF THE INVENTIONField of the Invention[0001]The present invention relates to a dressing board used when dressing of a cutting blade is carried out, a use method of a dressing board, and a cutting apparatus including a cutting unit.Description of the Related Art[0002]In a manufacturing process of device chips, planned dividing lines in a lattice manner called streets are set on surfaces of wafers and devices are formed in the respective regions marked out by the planned dividing lines. When these wafers are cut along the planned dividing lines, individual device chips are formed. Among the wafers are wafer for semiconductor devices formed of silicon, gallium arsenide, or the like, wafer for optical devices formed of SiC (silicon carbide) or the like, package substrate including resin and metal, ceramic substrate, glass substrate, and so forth.[0003]The cutting is carried out by a cutting apparatus having a cutting unit including a cutting blade having a circular ring shape...

AI Technical Summary

Benefits of technology

[0006]However, the amount of information that can be stored in the barcode is small and the information that can be stored in the barcode and relates to the dressing board is limited. Thus, it is conceivable that a two-dimensional code, with which the amount of information that can be stored is comparatively large, is disposed on the dressing board instead of the barcode. When the whole surface of the dressing board is employed as the region that can be cut for dressing thoroughly, the dressing board can be efficiently used. However, when the region in which the two-dimensional code is disposed is cut by a cutting blade even partly, the two-dimensional code becomes unreadable. For this reason, when use of the dressing board is suspended once and the dressing board is removed from a cutting apparatus and thereafter using the dressing board again is attempted, it is impossible to check the information relating to the dressing board from the two-dimensional code in some cases.

Problems solved by technology

However, the amount of information that can be stored in the barcode is small and the information that can be stored in the barcode and relates to the dressing board is limited.

However, when the region in which the two-dimensional code is disposed is cut by a cutting blade even partly, the two-dimensional code becomes unreadable.

For this reason, when use of the dressing board is suspended once and the dressing board is removed from a cutting apparatus and thereafter using the dressing board again is attempted, it is impossible to check the information relating to the dressing board from the two-dimensional code in some cases.

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