High pressure quartz glass bubbler ampoule and assembly

Inactive Publication Date: 2000-04-04
ARCH CHEM INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

One problem associated with the dispensing of the aforesaid chemicals relates to the strength of the bubbler assemblies which house the chemicals, and their ability to withstand relatively hi...

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  • High pressure quartz glass bubbler ampoule and assembly
  • High pressure quartz glass bubbler ampoule and assembly
  • High pressure quartz glass bubbler ampoule and assembly

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Embodiment Construction

Referring now to the drawings, there is shown in FIGS. 1 and 2, an embodiment of an improved ampoule, which is denoted generally by the numeral 2, and which is formed in accordance with this invention. The ampoule 2 has a circular side wall 4, a bottom wall 6, and a top wall 8. The side wall 4 and the top wall 8 are interconnected by a curvilinear corner wall 10; and the side wall 4 and the bottom wall 6 are likewise interconnected by a curvilinear corner wall 12. The bottom wall 6 is essentially flat, and the top wall 8 is essentially curved upwardly and outwardly. The ampoule 2 includes an integral gas inlet neck 14 that connects with a gas inlet dip tube 15 which extends downwardly into the ampoule 2, and tapers to a terminal nozzle opening 16 through which the carrier gas stream is bubbled into the liquid chemical contained in the ampoule 2. The opening 16 is sized so as to accurately control the amount of carrier gas released into the liquid chemical, and the size of the carrie...

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Abstract

A bubbler ampoule and bubbler assembly for containing highly corrosive chemicals is configured so as to provide enhanced strength which allows safe transport and usage of high vapor pressure chemicals. The enhanced assembly strength is provided by controlling the ratio of the bottom wall thickness to the side wall thickness of the ampoule; and by providing properly radiused corners on the ampoule.

Description

1. Field of the InventionThis invention relates to a bubbler ampoule and assembly for containment and shipping of toxic and corrosive liquid chemicals; and more particularly to a bubbler ampoule and assembly for containment of ultra high purity liquid chemicals that can develop relatively high vapor pressures.2. Brief Description of the ArtMany manufacturing processes utilize high-purity liquid chemicals which are entrained in a carrier gas for such procedures as semiconductor water doping, vapor deposition, water surface etching and cleaning, and the like. These high-purity liquid chemicals are shipped in and dispensed from high purity containers commonly known as "bubblers", due to the nature of the dispensing process. The bubbler assemblies are commonly formed from high purity quartz glass, glass, silicon, and non-reactive polymers, among other suitable materials. U.S. Pat. No. 4,140,735 Schumacher; U.S. Pat. No. 4,851,821 Howard et al.; and U.S. Pat. No. 4,886,178 Graf, all desc...

Claims

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Application Information

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IPC IPC(8): B65D1/09B65D85/84F17C3/12B01F3/04
CPCB65D1/09B65D85/84B65D85/42
Inventor DAUBS, MAURICE E.MURPHY, JR., JAMES H.
Owner ARCH CHEM INC
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