Drop injecting device and injecting controlling method therefor
A technology of droplet spraying and control method, which is applied in the direction of surface coating liquid device, semiconductor/solid-state device manufacturing, coating, etc., which can solve the problem that it is difficult to determine whether the liquid viscosity has been obtained
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no. 1 example
[0031] The structure of the inkjet device 100:
[0032] First, the structure of an inkjet apparatus 100 according to the present invention will be described with reference to FIG. 1 .
[0033] FIG. 1 is a schematic diagram showing a functional structure of an example of an inkjet apparatus 100 according to the present invention. The inkjet device 100 is used to make the 14 h 30 (tetradecane) or the like is attached to the device at a specific position on the substrate 126, and forms a desired conductive thin film pattern on the substrate 126.
[0034] The inkjet apparatus 100 has an X-direction driving device 110 as means for conveying a head unit, and a Y-direction driving device 120 as a means for conveying a substrate on a base 102 . The lower chassis 102 has a head drive control circuit 130 . It should be noted that in the drawings, the X direction, the Y direction, and the Z direction are orthogonal to each other.
[0035] The X-direction drive device 110 includes an...
no. 2 example
[0061] The structure of the inkjet apparatus according to the second embodiment:
[0062] Next, an explanation will be given of an inkjet apparatus according to a second embodiment. It should be noted that the inkjet device of this embodiment differs from that shown in FIG. 1 particularly in the structure of the viscosity measuring device 140 . Hereinafter, an explanation will be given of the viscosity measuring device 140A used in the present embodiment with reference to FIG. 7 . It should be noted that, in order to avoid repetition of the same explanation, the same reference numerals are applied to components of similar structure to the inkjet apparatus 100 in FIG. 1 . Such same reference numerals will also be used in the other embodiments below.
[0063] The viscosity measurement device 140A provides a measurement circuit 162 in which a crystal oscillator is provided. The crystal oscillator is connected to the electrode unit 160 immersed in the liquid 154 . The measuremen...
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