External chamber type tunable laser system for microelectromechanical corner mirror plane array elements

Abstract

This invention relates to adjustable laser system, which comprises light source, grating, corner lens array and receiver, wherein, the source is to send one beam; the grating is located before the source to facilitate the beam to generate one first reflection beam; the corner lens array is located before the grating to facilitate the first reflection beam to reflect the second reflection beam; the receiver is to receive one third reflection beam which is formed by the second beam through the grating reflection.

Description

technical field [0001] The invention relates to an adjustable laser system, in particular to an adjustable laser system using a corner mirror array. Background technique [0002] Micro-electromechanical system (MEMS) has been widely valued since the late 1980s; it is a general term for integrated micro-components or systems, and furthermore, it includes the use of IC-compatible batch processing technology to manufacture Electronic and mechanical parts; and the size of the manufactured components or systems is as small as microns and the largest does not exceed millimeters. [0003] Due to the characteristics of small size, powerful functionality and low cost of micro-electromechanical systems, in recent years, industries such as semiconductors, electronics, machinery, communications, biology or chemistry have invested a lot of research funds on them; and related products, Products such as accelerometers, optical communication switches, and biosensors have also come out one ...

AI Technical Summary

Problems solved by technology

However, in the traditional chamfered incidence external cavity tunable laser system, in order to achieve the effect of tunable wavelength, the structure of the laser system will need optical elements with shading effect, such as the aforementioned I-shaped plate or It is a V-shaped plate, which will complicate the organization of the entire laser system and is not suitable for all current trends that emphasize lightness and compactness; therefore, how to make the system architecture more streamlined without affecting the efficacy of wavelength modulation It has become the focus of improving the application scope of the angle-cutting incident external cavity adjustable laser system

However, at present, in order to make the incident light reflect parallel to the original path, most of the reflectors currently used are a combination of a vertical mirror and a horizontal mirror. However, currently available reflectors on the market Although the mirror combination emphasizes that the angle accuracy between the vertical mirror surface and the horizontal mirror surface is 90°+0.08°, this error range (+0.08°) is undoubtedly a major limitation affecting the efficiency of the instrument in all micro-electromechanical fields that emphasize precision and ingenuity. Factor, therefore, how to improve the verticality of the mirror combination is also a major research topic of the semiconductor laser system

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