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Microelectromechanical optical display subass embly

An optical display and micro-electromechanical technology, applied in the direction of optical components, optics, optomechanical equipment, etc., can solve the problems of damage to the outer support column 16, decrease in reliability of display components, erosion, etc.

Active Publication Date: 2008-01-09
AU OPTRONICS CORP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, since there is no protective layer on the top of the outer supporting pillars 16 of the traditional MEMS optical display assembly 10, the outer supporting pillars 16 directly exposed to the outside are very easy to be affected by acid, alkali, Corrosion by solvent or etching gas causes damage to the top or top 162 of the outer support column 16, resulting in a decrease in the reliability of traditional MEMS optical display components

Method used

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  • Microelectromechanical optical display subass embly
  • Microelectromechanical optical display subass embly
  • Microelectromechanical optical display subass embly

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Embodiment Construction

[0051] FIG. 3 is a schematic diagram of the MEMS optical display assembly of the present invention. The glass substrate 32 of the MEMS optical display assembly 30 is provided with a plurality of mutually spaced transparent wires 33 and a dielectric layer 34 covering it, and a plurality of inner support columns 37 and outer support columns 36 are arranged on the dielectric layer 34 and the reflective layer 38, the reflective layer 38 and the dielectric layer 34 are separated by a predetermined distance.

[0052] The transparent wires 33 and the reflective layer 38 are elongated and perpendicular to each other. The crossed areas of the transparent wires 34 and the reflective layer 38 form rectangular pixel units 31a and 31b. The outer support pillars 36 are arranged between two adjacent pixel units or adjacent to the periphery of the pixel units, but different from the conventional one, each reflective layer 38 completely covers the end connected to the outer support pillars 36 ...

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Abstract

This invention is a micro electromechanical optics display assembly, including a transparent base planet with many transparent conductors, a dielectric layer, many reflecting layers and many external holding columns. The external holding column has the first and the second ends, the first end connects to the dielectric layer, the second end connects to the reflecting layer, there into, the reflecting layer totally covers the second end.

Description

technical field [0001] The invention relates to a micro-electro-mechanical optical display component, in particular to an improved supporting structure of the micro-electro-mechanical optical display component. Background technique [0002] US Patent No. 6,574,033 and No. 6,794,119 respectively disclose a new type of MEMO system (Microelectromechanical optical systems, MEMO system), which achieves the purpose of image display through a suspended reflective structure and the principle of interference. [0003] Fig. 1A is a schematic diagram of a traditional microelectromechanical optical display assembly, and Fig. 1B is a sectional view of the a-a section in Fig. 1A. As shown in Fig. 1A and Fig. 1B, the surface of the glass substrate 12 of the traditional microelectromechanical optical display assembly 10 has a plurality of equal intervals The provided transparent wires 13 , the dielectric layer 14 covering the transparent wires 13 , and a plurality of reflective layers 18 ar...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/00G03F7/00
Inventor 李嘉盛林汉涂翁嘉璠
Owner AU OPTRONICS CORP