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Method for mass production of plurality of magnetic sensors

A magnetic sensor, mass-produced technology, applied to field-controlled resistors, manufacturing/processing of electromagnetic devices, etc.

Inactive Publication Date: 2008-01-16
ASULAB SA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0013] It is easy to understand that such technology, although available at the experimental stage, must not be used on an industrial scale, where it must be possible to produce very large quantities of components quickly and cheaply

Method used

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  • Method for mass production of plurality of magnetic sensors
  • Method for mass production of plurality of magnetic sensors
  • Method for mass production of plurality of magnetic sensors

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Embodiment Construction

[0027] The present invention proceeds from an innovative general idea of ​​forming a thin film of amorphous magnetic material from a plurality of strips of amorphous magnetic material arranged side by side on a support plate, and bonding the film thus obtained to a semiconductor On the wafer in which the electronic circuits associated with the magnetic sensor to be produced have previously been integrated. After this bonding step, the thin film of amorphous magnetic material is structured by etching in order to produce a magnetic core which constitutes the part of the magnetic sensor which is sensitive to an external magnetic field. Because of these characteristics, it solves the problems caused by the technology that is currently used to produce semiconductor devices but cannot make amorphous layers, and makes it possible to mass produce magnetic sensors with amorphous magnetic cores.

[0028] The invention will be described in connection with a magnetic sensor as described i...

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Abstract

The invention concerns a method for mass production of a plurality of magnetic sensors (1) produced on a semiconductor substrate (4), said sensors (1) comprising at least a magnetic core (8) made of an amorphous magnetic material. The invention is characterised in that, after integrating electronic circuits associated with the magnetic sensors (1), an amorphous magnetic material film (22) is bonded on the semiconductor substrate (4), said film being obtained from an amorphous magnetic material strip cut out into several sections (18) which are arranged juxtaposed on a support (20), said film being then structured to form the magnetic cores (8) of said magnetic sensors (1), the semiconductor substrate (4) being finally cut out to provide a plurality of individual magnetic sensors (1).

Description

technical field [0001] The present invention relates to a method of mass producing a plurality of magnetic sensors. In particular it is suitable, but not exclusively, for magnetic sensors of the type described in patent application EP 1 052 519, filed in the applicant's name. Background technique [0002] In Fig. 1 attached to this patent application, a magnetic sensor of the above-mentioned type is shown in a perspective exploded view. Such a magnetic sensor is indicated generally by the general reference numeral 1 and is mounted on a surface 2 of an approximately parallelepiped-shaped semiconductor body 4 . The electronic circuits (not shown) associated with this magnetic sensor are implemented by CMOS integration on the large upper surface 2 of the semiconductor substrate 4 . [0003] The magnetic sensor 1 contains a planar excitation coil 6 which is produced in a metal layer added on the surface 2 of the base body 4 during the CMOS integration process. The coil 6 has ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L43/12H10N50/01H10N50/10
CPCH01L43/12H10N50/01
Inventor D·皮盖F·文森特
Owner ASULAB SA
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