Method for manufacturing color separation film

Abstract

After a metal layer and photoresistive layer being formed on a substrate, notches with certain pattern are defined by techniques of microphotograph, develop and etching in order to expose part of substrate. With filter being formed on the said structure through filming manufacturing process in high temp, remanent photoresistive layer and metal layer are removed by metallic corrosion liquid and stripping method so as to obtain the filter with designed pattern. Since the filter is made at high temp such as 300-400 deg.C, quality is raised, providing colour-separation plate with high quality.

Description

technical field [0001] The present invention relates to a color separation film (color filter), which has been widely used in projection television systems and virtual reality systems to divide the self-light of a self-light source into three primary colors of red, blue and green. The optical projection unit projects onto the screen. Background technique [0002] The existing color separation films are generally installed in the projection system by assembly, so the red, blue and green color filters can be manufactured separately, and have a high tolerance. With the increase of the integration level of the projection system, the red, blue and green color filter films can be formed on a transparent substrate by using the manufacturing process related to the integrated circuit. [0003] FIG. 1 shows a conventional method for manufacturing a color separation film. [0004] S100, as shown in FIG. 1A, first prepare a substrate 112; [0005] S102, as shown in FIG. 1B, forming a...

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Problems solved by technology

However, since the photoresist 116 cannot withstand high temperature, it will limit the quality of the filter material 24, resulting in unsatisfactory characteristics of the extinction ratio.

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