Exhaust hood

Abstract

One kind of fume hood, encircle set around the airtight reaction chamber aperture to collect and discharges the waste gas, including: A center spatial drive pipe, and the pipeline which is connected with this center spatial drive pipe unites,another end of this pipeline connects with the vacuum de-aerating plant,equip at least air vent on the endophragm of this center spatial drive pipe ; the airtight reaction chamber waste gas is pumped from air vent the center spatial drive pipe and is discharged from the pipeline; Place above this installment fixes the exhaust pipe on the upper of the stated airtight reaction chamber open mouth,to strengthen the exhaust effect; Moreover, it also may gather many airtight reaction chambers fume hood exhaust pipe into an always pipeline, connects with the vacuum pumps installment; Because this equipment may exhaust while cleans,it does not need to wait for 30time of above N2flushes then to be able to clean like the existed the technology, therefore enables the working efficiency remarkably to enhance; And is more advantageous to operator's health.

Description

technical field [0001] The invention relates to the technical field of integrated circuit manufacturing, in particular to an exhaust hood for collecting and discharging waste gas generated in a closed reaction chamber (Chamber). Background technique [0002] In the manufacturing process of integrated circuits, in order to ensure the normal operation of the machine and reduce the number of downtime (DOWN) to a minimum, regular preventive maintenance (preventive maintenance) must be carried out on the machine including the closed reaction chamber. , PM), because this kind of maintenance now generally uses fluorine-containing gases, such as: C 4 f 8 、C 5 f 8 etc., so it is easy to produce harmful gas residues. When the staff maintain the machine, these fluorine-containing gases will endanger their health; moreover, the organic solvent PF5060 used in the closed reaction chamber is also a volatile fluorine-containing gas. Therefore, detectors are generally installed on the ma...

AI Technical Summary

Problems solved by technology

Since more than 30 exhausts must be carried out, of course, the cleaning operation time will be prolonged and the work efficiency will be reduced.

[0004] Moreover, even after more than 30 N 2 After flushing, it may sometimes cause false alarms from the detectors (not shown) on the machine; this is because the detectors were originally designed to detect fluorine and other harmful gases that are harmful to the human body when they exceed the standard and give an alarm. , but in the actual operation process, some solvents used in the closed reaction chamber will also produce some non-toxic gases. After the gas reaches a certain concentration, it will also cause the alarm of the detector, while the existing technology only uses N 2 Flushing is easy to make the gas discharge incomplete. When this situation causes the alarm of the detector, the operator will mistakenly believe that the fluorine exceeds the standard, and the top cover of the sealed reaction chamber has to be closed again for N 2 flushing, so that the operation is at a standstill, resulting in unnecessary waste; but from the perspective of safety, the design of the detector cannot be cancelled.

[0005] In summary, there are two disadvantages in the exhaust device of the prior art: one is the N 2 The number of times of flushing and discharging makes the operation time long and the efficiency is low; secondly, due to the incomplete exhaust, it is easy to cause false alarm of the detector and affect the production

Images