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Micro-structural component two-dimensional translational remote operating method

A technology of two-dimensional translation and micro-components, applied in the field of remote control, can solve problems such as difficult to apply

Inactive Publication Date: 2009-07-22
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

It can be seen that micro-components may not only vibrate around the equilibrium position, but also break through the equilibrium position and move freely at different speeds and in different ways. For the latter, existing theories and application methods are difficult to apply

Method used

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  • Micro-structural component two-dimensional translational remote operating method
  • Micro-structural component two-dimensional translational remote operating method
  • Micro-structural component two-dimensional translational remote operating method

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Embodiment Construction

[0030] The present embodiment adopts the ultrasonic transducer T that three equilateral triangles are arranged 1 ,T 2 ,T 3 , the radiation power of the three transducers is 35W, the frequency is 1.75MHz, and the beam radius is 10mm. The radiated continuous sinusoidal wave ultrasonic beams interfere in the intersecting area to form a two-dimensional standing wave sound field. The sound axes of the three ultrasonic beams are at In the same plane, the included angle is 120°, the vertical distance from the intersection of the three acoustic axes to the transducer surface is 86.6mm, within the Rayleigh distance (the near-field distance of the piston transducer), that is, the near-field section is applied and the plane can be used Traveling wave description.

[0031] The sound pressures of the three beams of ultrasonic waves at a certain point r in space are respectively where k 1 、k 2 、k 3 are the wave vectors of the three ultrasonic beams, φ 1 , φ 2 , φ 3 are the ini...

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Abstract

The present invention proposes a two-dimensional translation telecontrol method for micro-components, which is based on ultrasonic radiation force and uses an ultrasonic transducer as a power source to decompose the set movement path of micro-components into several displacements along two-dimensional coordinates , calculate the step value (Δx, Δy) of each step through the interpolation algorithm of the two-dimensional plane curve, calculate the phase change value of the transducer beam with a specific formula, change the phase of the beam, and make the micro-components translate; so Repeat multiple times, so that the micro-components can be translated according to the set path. The method of the present invention can realize the two-dimensional translation of the micro-component in a non-contact manner without being limited by the shape and optical characteristics of the micro-component. After experiments, the controllable manipulation range is greater than 5mm*5mm, and the manipulation precision is less than 0.5μm.

Description

technical field [0001] The invention belongs to the field of microsystems, and more specifically relates to the remote manipulation technology of micro components in micron to nanometer scales. Background technique [0002] Micro-System Technology (Micro-System Technology) as a technology to understand and transform the objective world in the microscopic field, especially with the development from unit device production to integrated hybrid systems, the manipulation and assembly technology of micro-components has become more important. sex and urgency. Therefore, exploring new theories and mechanisms to develop this technology is a fundamental key research topic in the field of microsystem technology. [0003] At present, the mechanism of micro-component manipulation technology mainly includes: [0004] The first category is to extend the manipulation technology in macroscopic assembly to microscopic field applications, such as micro tweezers, micro pipettes and so on. Th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/00
Inventor 范宗尉杨克己傅建中陈子辰
Owner ZHEJIANG UNIV
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