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Detecting system and method for process gas leakage source

A detection system and process gas technology, applied in the field of detection systems, can solve problems such as production loss and false alarms

Active Publication Date: 2009-09-09
IND TECH RES INST
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, although a large number of gas sensors can be used to monitor the occurrence of gas leaks, occasionally false alarms (False Alarm) events will occur, that is, although some gas leaks are within the controllable range, the gas sensors will still issue warnings. This false alarm incident also caused many unnecessary production losses

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  • Detecting system and method for process gas leakage source
  • Detecting system and method for process gas leakage source

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Embodiment Construction

[0018] In order to make the purpose, features, and advantages of the present invention more obvious and understandable, the preferred embodiments are specifically cited below, together with the accompanying drawings Figure 1 to Figure 2 , for a detailed description. The description of the present invention provides different examples to illustrate the technical features of different implementations of the present invention. Wherein, the configuration of each component in the embodiment is for illustration, not for limiting the present invention. Moreover, part of the reference numerals in the embodiments is repeated, for the sake of simplicity of description, it does not imply the correlation between different embodiments.

[0019] The embodiment of the invention discloses a process gas leakage source detection system and method. The electronic process exhaust management system developed through the gas detection method of the embodiment of the present invention, combined w...

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Abstract

A leakage source detection system of process gas is prepared for setting open path Fourier conversion infrared spectrograph detection unit at gas return position of plant for detecting leakage gas then sending detected gas to data server through communication network, setting multiple sampling holes and gas extracting Fourier conversion infrared spectrograph detection unit in plant for detecting leakage from pipeline then sending detected gas to data server through said network, using infrared spectrograph to detect out composition of detected gas and making analysis and judgment on possible leakage source by tail gas management unit according to said composition.

Description

technical field [0001] The present invention relates to a detection system and method, and in particular to a process gas leakage source detection system and method. Background technique [0002] There are many types of chemical substances used in the optoelectronic and semiconductor industries, and some of them are dangerous and harmful. However, gas leakage may occur due to accidents, which will cause damage to chip manufacturing and the health of employees. In order to avoid the damage caused by hazardous gas leakage to the wafer manufacturing, optoelectronic and semiconductor factories use gas monitors extensively. At present, the commonly used gas sensors can be divided into catalytic combustion gas sensors, semiconductor adsorption gas sensors, field effect transistor gas sensors, electrochemical gas sensors and so on. [0003] However, although a large number of gas sensors can be used to monitor the occurrence of gas leaks, occasionally there will be false alarms (F...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M3/02
Inventor 吕建豪颜绍仪施惠雅游生任
Owner IND TECH RES INST