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Method for processing internal wall of hyperpure silicon alkyl gas cylinder

A treatment method and gas cylinder technology, which is applied in the field of inner wall treatment of ultra-pure silane gas cylinders, can solve problems such as phosphide pollution and fluoride pollution, and achieve the effect of ensuring purity and long-term stability

Inactive Publication Date: 2009-10-14
NANJING SPECIAL GAS FACTORY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Anodizing of the inner wall is mainly for aluminum alloy gas cylinders, not suitable for steel gas cylinders; fluorine-coated materials are mainly coated with fluorine-containing materials, which will cause fluoride pollution; although phosphating treatment can be used for surface protection of steel materials, It also brings phosphide pollution, and because of the porosity of its phosphating layer, it is easy to absorb active gases such as water, which will bring new pollution sources

Method used

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  • Method for processing internal wall of hyperpure silicon alkyl gas cylinder

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Embodiment

[0015] Example: such as figure 1 Shown, the inner wall processing method of a kind of ultrapure silane cylinder of the present invention, its steps are as follows:

[0016] 1. Grinding the inner wall: Remove the cylinder valve from the processed gas cylinder, place it on a rotating cylinder rolling machine, put 4-6kg of quartz sand with a diameter of 6-8mm into the gas cylinder, add 10-15kg of deionized water to rotate the cylinder, Grind for 3 to 4 hours. Pour out the quartz sand and deionized water (if it is an oily gas cylinder, clean it with benzene, acetone, ethanol solvent in advance, and then clean it with deionized water. It is recommended not to use the oily gas cylinder that has not been cleaned).

[0017] 2. Inner wall inspection: Use an endoscope to check the inner wall of the gas cylinder. There should be no unpolished rust scars and rough surfaces. If there are any, re-polish and check again.

[0018] 3. Inner wall cleaning: Use deionized water to clean the inn...

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Abstract

The invention discloses a method for processing the inner wall of an ultrapure silane air bottle, which comprises following steps: sanding the inner wall, using quartz sand and deionized water to sand, using an endoscope to check the inner wall of the air bottle, wherein the surface which has rust scars and is not smooth is not allowed, adopting the deionized water to wash the inner surface of the air bottle, wherein the surface is qualified until the conductivity is less than or equal to 0.1uS / cm after washing, inverting the air bottle, pouring out water which is remained in the bottle, plating zinc-nickel composite coating on the inner wall, then, washing the inner wall, drying the air bottle, pumping vacuum of the air bottle to less than or equal to 10Pa, filling 6N high-purity hydrogen to 3-4MPa, placing for 24 hours, then, measuring the moisture content of gas in the air bottle, wherein when the moisture content <= 0.5ppm is qualified, discharging the hydrogen, pumping the vacuum to less than or equal to 1Pa, bottling the silane, placing for more than 10 days analyzing the content of various foreign matters in the silane and in particular the moisture content which is less than or equal to 2ppm, reanalyzing after 30days and 60days, and finishing processing if various indexes of the foreign matters are invariable.

Description

technical field [0001] The invention relates to a method for treating the inner wall of a gas cylinder containing electronic gas, in particular to a method for treating the inner wall of an ultrapure silane gas cylinder. technical background [0002] Cylinders are made of a variety of materials, the most commonly used are carbon steel and aluminum alloy cylinders, and cylinders made of stainless steel. The gas cylinders used to hold electronic gases mostly involve specially treated gas cylinders with patented technology abroad, such as Praxair’s ULTRAPURE high-pressure and low-pressure stainless steel cylinders, ULTRACLEAN specially treated steel cylinders, FIBRALUME aluminum alloy cylinders, etc.; Air Liquide’s UNIQUAL Cylinders, etc. Inner wall anodic oxidation, nickel-zinc alloy coating, fluorine-coated materials, phosphating treatment, etc. have also been developed in China, but most of them are used for the containment of various instrument calibration gases, and are n...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C18/16C23C18/18
Inventor 林培川
Owner NANJING SPECIAL GAS FACTORY