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Bulk acoustic wave sensor

A sensor and sensing layer technology, applied in the field of sensors, can solve problems such as low Q coefficient and low sensitivity

Inactive Publication Date: 2009-12-09
KONINK PHILIPS ELECTRONICS NV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This results in lower sensitivity and lower Q-factor of the device

Method used

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  • Bulk acoustic wave sensor
  • Bulk acoustic wave sensor

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Embodiment Construction

[0015] A sensor according to the invention comprises a substrate and at least one resonator. The resonator includes an acoustic reflector, first and second electrodes, a piezoelectric layer, and a sensing layer.

[0016] More preferably, the sensor comprises a plurality of individually addressable resonators. More preferably, said plurality of resonators are arranged in a rectangular row and column configuration comprising m rows and n columns. With such an arrangement, a sensor array is realized. Most preferably, each resonator is individually addressable. figure 1 The circuit of such a sensor array comprising m.n resonators R is shown.

[0017] If the sensor includes multiple resonators, each resonator is separated from its neighbors by a distance at which the resonance energies do not overlap.

[0018] The sensor comprises a substrate 1 comprising a semiconductor material such as Si or GaAs or such as glass or Al 2 o 3 such insulating materials. The resonator is depo...

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Abstract

The invention describes a sensor comprising a substrate 1 and at least one resonator comprising an acoustic reflector 2, a piezoelectric layer 5, first and second electrodes 3, 4 and a sensing layer (6), Wherein the first and second electrodes 3 , 4 are placed on the same side of the piezoelectric layer 5 . The sensing layer reacts with chemical or biological agents through absorption, adsorption, desorption or chemical reaction. As a result, the individual frequencies of the resonators change and conclusions can be drawn about the chemical or biological agent. These sensors are sensitive to the agent being detected, especially when used in liquids.

Description

technical field [0001] The invention relates to a sensor comprising a substrate and at least one resonator comprising an acoustic reflector, a piezoelectric layer, first and second electrodes and a sensing layer. [0002] Fast and accurate detection of chemical and biological agents is important for activities such as environmental pollution detection or military applications. [0003] So far, bio / chemical sensors are based on calorimetric or gravimetric effects. Background technique [0004] For example, US5936150 describes a chemical sensor using a thin film acoustic resonator coated with a chemically sensitive sorbent coating. The thin film acoustic resonator has electrodes separated by a thin film piezoelectric layer and is supported by a multilayer resonant acoustic isolator. To detect chemicals, the chemical of interest (usually a vapor) comes into contact with and interacts with the exposed sorbent surface coating, which results in mass and / or mechanical properties ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/00G01N5/02G01N11/16G01N29/02H10N30/80G01N29/036H10N30/00
CPCG01N29/022G01N2291/0256G01N29/036G01N2291/0426
Inventor H·-P·勒布尔M·温德特
Owner KONINK PHILIPS ELECTRONICS NV