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Method of producing large diameter transparent quartz glass tube for integrated circuit by continuous melting method

An integrated circuit and transparent quartz technology, which is applied in the field of continuous melting method to produce large-diameter transparent quartz glass tubes for integrated circuits, can solve the problems of many bubbles and gas lines in quartz glass tubes, and the quality and specifications cannot meet the technical requirements of integrated circuits. Effects of improving melting conditions, increasing pressure, and improving quality

Inactive Publication Date: 2010-02-03
徐胜利
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The production method of the quartz glass tube in the prior art can only produce a qualified quartz glass tube with a diameter of about 80 mm and a wall thickness of 4 mm. If a quartz glass tube with a slightly larger diameter is to be pulled out by force, the pulled out quartz glass tube There are many gas bubbles in the glass tube, and its quality and specifications cannot meet the technical requirements of integrated circuits

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0013] Example 1. A continuous melting method for producing large-diameter transparent quartz glass tubes for integrated circuits. The quartz glass raw material, high-purity quartz sand, is put into a continuous melting furnace and melted by electric heating. The tube machine is drawn into a large-diameter transparent quartz glass tube; the high-purity quartz sand is preheated for 120 minutes after the raw material high-purity quartz sand is put into the continuous furnace and before heating and melting, and the high-purity quartz sand is preheated to 550 °C , and then heating and melting; the upper part of the tungsten-molybdenum crucible of the continuous melting furnace is a preheating section, and the lower part is a melting section, and the preheating treatment is carried out in the preheating section of the tungsten-molybdenum crucible of the continuous melting furnace; the tungsten-molybdenum crucible of the The diameter is 330mm and the height is 1450mm; the melting te...

Embodiment 2

[0014] Example 2. A continuous melting method for producing large-diameter transparent quartz glass tubes for integrated circuits. The quartz glass raw material, high-purity quartz sand, is put into a continuous melting furnace and melted by electric heating. The tube machine is drawn into a large-caliber transparent quartz glass tube; the high-purity quartz sand is preheated for 180 minutes after the raw material high-purity quartz sand is put into the continuous furnace and before heating and melting, and the high-purity quartz sand is preheated to 650 °C , and then heating and melting; the upper part of the tungsten-molybdenum crucible of the continuous melting furnace is a preheating section, and the lower part is a melting section, and the preheating treatment is carried out in the preheating section of the tungsten-molybdenum crucible of the continuous melting furnace; the tungsten-molybdenum crucible of the The diameter is 370mm and the height is 1500mm; the melting tem...

Embodiment 3

[0015] Example 3. A continuous melting method for producing large-diameter transparent quartz glass tubes for integrated circuits. The quartz glass raw material, high-purity quartz sand, is put into a continuous melting furnace and melted by electric heating. The tube machine is drawn into a large-diameter transparent quartz glass tube; the high-purity quartz sand is preheated for 150 minutes after the raw material high-purity quartz sand is put into the continuous furnace and before heating and melting, and the high-purity quartz sand is preheated to 600 °C , and then heating and melting; the upper part of the tungsten-molybdenum crucible of the continuous melting furnace is a preheating section, and the lower part is a melting section, and the preheating treatment is carried out in the preheating section of the tungsten-molybdenum crucible of the continuous melting furnace; the tungsten-molybdenum crucible of the The diameter is 350mm and the height is 1500mm; the melting te...

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Abstract

A continuous method of manufacturing large aperture transparent quartz glass tube for integrated circuit, which is characterized in that high pure quartz sand of quartz glass material is added in a continuous melting furnace, through electric heating and fusing, fused quartz glass liquid is drew as large aperture transparent quartz glass tubes through a former, a material stage and a tube drawingmachine; the high pure quartz sand added in the continuous melting furnace, before heating and fusing, preheating the high pure quartz sand 120-180 minutes to 550-650 DEG C, then heating and fusing; the upper part of the continuous melting furnace tungsten-molybdenum crucible is a preheating section, the lower part is a fusing section, the preheating treatment is processed in the preheating section; the diameter of the tungsten-molybdenum crucible is 330-370 mm, height is 1450-1500 mm; the fusing temperature in the continuous melting furnace is 2050-2150 DEG C; the diameter of the former is 190-210 mm; the current passing through the continuous melting furnace for electric heating molybdenum electrode is 210-220 A, the voltage is 19-20 V. The method can manufacture quartz tubes with wide gauge and improve product quality.

Description

technical field [0001] The invention relates to a production method of a quartz glass tube, in particular to a method for producing a large-diameter transparent quartz glass tube for integrated circuits by continuous melting. Background technique [0002] The production method of the quartz glass tube in the prior art can only produce a qualified quartz glass tube with a diameter of about 80 mm and a wall thickness of 4 mm. If a quartz glass tube with a slightly larger diameter is to be pulled out by force, the pulled out quartz glass tube The glass tube has many bubbles and gas lines, and its quality and specifications cannot meet the technical requirements of integrated circuits. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide a new continuous melting method for producing transparent quartz glass tubes for the deficiencies of the prior art. This method can be used to produce large-diameter tubes suitable for in...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03B20/00C03B5/08C03B15/14
CPCC03B17/04C03B5/0275C03B20/00C03B5/1672
Inventor 徐胜利
Owner 徐胜利
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