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XYtheta moving stage

A technology for moving the stage and the stage, which is applied in the field of XYθ moving stage

Inactive Publication Date: 2010-09-22
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In such an exposure apparatus, when the exposure region on the end side of the workpiece 108 is wobbled in the φ direction during exposure, since the surface of the workpiece 108 is shifted from the imaging position of the projection lens 106, the mask pattern projected onto the workpiece 108 The image is blurred, making the exposure accuracy poor

Method used

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Embodiment Construction

[0045] use Figure 1 to Figure 6 The first embodiment of the present invention will be described.

[0046] figure 1 It is a sectional view showing the structure of an exposure apparatus to which an XYθ moving stage of the present invention is applied, figure 2 yes figure 1 Top view of the XYθ mobile stage shown. in addition, figure 1 for figure 2 A-A cross-sectional view of , and in figure 1 in, omit as Figure 8 The photoirradiation section, mask, and mask stage are shown.

[0047] As shown in these figures, 1 is the stage base constituting the base plate or base frame on which the XYθ movable stage is mounted; 2 is the thrust generating unit provided on the stage base 1; 4 is the auxiliary supporting part fixed on the stage base 1; 5 is a plane stage made of a flat plate 6, a honeycomb interlayer (honeycomb core) 7, and a platen 8; 6 is a carrier Place and hold the flat plate of the workpiece 9 exposed to the surface; 7 is a honeycomb interlayer arranged on the...

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Abstract

The invention provides a XY theta moving stage, which will not also produce swing even if the plain plate is exerted with a deflection load. A XY theta moving stage has a board (6) that keeps a workpiece (9). The board (6) may move on orthogonal direction XY of the board surface and a rotation direction theta around the orthogonal axle of the said board surface. The moving stage is charactered inthat it has: a stage base (1); a thrust producing unit (2), which is fixed on the stage base (1) and has magnetic poles for generating the moving a magnetic field; three reference holding components (3) fixed on the stage base (1); and more than one supplementary holding components (4) fixed on the stage base (1). The board (6) is supported by three reference holding components (3) and more than one supplementary holding components (4); and a plane type bedplate (8) fomed with a projecting pole of a cancellate shape is disposed on the opposite side of the surface that keeps a workpiece (9), and it is drived by the unit (2) produced by the thrust.

Description

technical field [0001] The present invention relates to an XYθ mobile stage, for example, used in exposure devices or inspection devices, which can be used in the XY direction orthogonal to the plate surface holding the workpiece and the θ rotation direction around the axis perpendicular to the plate surface Moving XYθ mobile stage. Background technique [0002] In the past, as shown in Japanese Patent Laying-Open No. Hei 9-23689, a known planar stage device is provided with a ferromagnetic salient pole on a planar platen (platen) that is moved by air. The body floats to apply a magnetic force to the moving body, and the moving body is moved by changing the magnetic force between the moving body and the salient poles of the platen. [0003] In the planar stage of the above-mentioned device, since one surface (usually the top) of the mobile body is a workpiece stage for placing workpieces, the surface of the mobile body and the surface of the platen are processed with high p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/027G03F7/20
CPCH02K41/02B23Q1/25H02K5/173H02K5/20H02K5/167H02K7/085
Inventor 田中米太
Owner USHIO DENKI KK
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