Method and apparatus for measuring 1/4 wave plate phase delay and quick shaft direction

A phase delay and axis direction technology, applied in the field of polarized optical detection, can solve the problems of complex manual operation, inability to automatically complete the measurement, and difficulty in improving the measurement accuracy.

Inactive Publication Date: 2007-08-22
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

[0003] The technical problem solved by the present invention is: for the deficiencies in the above-mentioned existing various measurement methods: it is only suitable for the measurement of 1/4 wave plate under a specific monochromatic wavelength, and the measurement in a wide spectral range cannot be realized; the measurement accuracy is difficult Improvement, standard plate and fast axis direction are difficult to obtain; complex manua

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  • Method and apparatus for measuring 1/4 wave plate phase delay and quick shaft direction
  • Method and apparatus for measuring 1/4 wave plate phase delay and quick shaft direction
  • Method and apparatus for measuring 1/4 wave plate phase delay and quick shaft direction

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[0050] The present invention will be further described below in conjunction with drawings and embodiments.

[0051] Fig. 1 is the structure of the λ / 4 rhombic Fresnel Fresnel doubler used in the present invention, and θ is the structural angle of the doubler, and its size is equal to the total internal reflection angle. It can be seen from Fig. 1 that the outgoing ray and the incident ray are on the same straight line, because four internal reflections occur in the rhombic body, so when the non-normal incident angle changes, the influence on the phase delay change of the double rhombic body is compensated; in addition, It also compensates a part of the influence of the change of the refractive index with the wavelength, so that the double rhombic body of this structure has good achromatic performance. Applicable to the measurement of wave plates with a wide spectral range.

[0052] Fig. 2 is a graph showing the phase delay error of the λ / 4 Fresnel doublet as a function of wav...

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Abstract

A method and device for measuring displacement delay and axle direction of 1/4 wave-plate. Its principle is: uses light intensity detecting technique of elliptical polarization, setslambda/4 Fresnel double diamond and 1/4 wave-plate between polarizer and analyzer in turn, rotates wave-plate and analyzer to different position and detecting output light intensity, finally achieves displacement delay and axle direction of 1/4 wave-plate. The invention can detect displacement delay and axle direction of 1/4 wave-plates with different wavelength in a wide spectral range, which has high detecting precision, convenient operation and automatic measurement.

Description

technical field [0001] The invention belongs to the technical field of polarization optical detection, in particular to a method and a device for measuring the phase delay and fast axis direction of a 1 / 4 wave plate. Background technique [0002] Waveplates are often used in ellipsometry or optical measurement to change the polarization state of light. The phase delay error of the waveplate will have a great impact on the measurement results. Accurately measure the fast and slow axis directions of the wave plate within the range. There are many methods to measure the phase delay and fast axis direction of 1 / 4 wave plate, mainly including: optical heterodyne method, standard plate compensation method, ellipsometry, etc. The above methods are often only suitable for measuring a specific monochromatic wavelength The phase delay and fast axis direction of the lower 1 / 4 wave plate, and for the 1 / 4 wave plate at other wavelengths, especially the multi-stage wave plate, it is diff...

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Application Information

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IPC IPC(8): G01M11/02G01J4/00
Inventor 薄锋朱健强康俊范微
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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