Appearance checking device

Abstract

The invention provides an appearance inspection device (A) which as macroscopic illumination portion (1) for irradiating substrate (2) and substrate holding portion (4) for holding the substrate to be irradiated by light. In the appearance inspection device (A), the substrate holding portion (4) holds the substrate approximately vertical to the surface (2a) of the substrate (2), and the macroscopic illumination portion (1) is arranged on a observation desk (3) where inspector (7) can observe reflected light or penetrating light from the substrate (2), and under a state that the substrate (2) is approximately vertically held on the substrate holding portion, the macroscopic illumination portion (1) and the observation desk (3) can move relatively along a two-dimension direction of the substrate surface.

Description

technical field [0001] The present invention relates to an appearance inspection device for inspecting thin transparent substrates used for manufacturing FPDs (Flat Panel Displays: Flat Panel Displays) such as liquid crystal displays. Background technique [0002] Conventionally, for example, mother glass substrates (hereinafter referred to as substrates) of FPDs such as liquid crystal displays are manufactured, and the film unevenness and pattern defects of the protective layer coated on the surface of the substrate are inspected by an appearance inspection device ( hereinafter referred to as defects). This inspection is carried out as follows: the substrate is tilted at an angle suitable for observation (for example, 45 degrees) from a horizontal state, macroscopic illumination light is irradiated on the substrate surface in this state, and the reflected light from the substrate is visually observed by the inspector. Check by detecting abnormal reflected light. [0003] ...

AI Technical Summary

Problems solved by technology

However, if the substrate holding part is inclined at 45 degrees, the substrate is far away from the inspector, so there is a problem that the inspector cannot approach the substrate for detailed observation

As a countermeasure, it has also been considered to lift the substrate holding part vertically to approach the inspector's side, but if the substrate is lifted vertically, macroscopic illumination light cannot be irradiated on the substrate surface, and defects cannot be observed during the time when the substrate is lifted. The problem of not reaching the defect location

[0008] Furthermore, when inspecting a large and thin substrate by illuminating it from the back side with a back light, since the peripheral portion of the substrate is sucked and held at many places in the substrate holding portion formed in a rectangular frame shape, a problem occurs. When the substrate is tilted at 45 degrees, it bends due to the substrate's own weight, which reduces the inspection accuracy

As a countermeasure, it has also been considered to provide a plurality of rod-shaped support members that support the back side of the substrate in the opening of the substrate holding portion. The problem that the entire surface of the substrate cannot be observed due to the shadow

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