Method of producing large diameter transparent quartz glass tube for semiconductor technology by continuous melting method

A technology of transparent quartz and semiconductor, which is applied in glass molding, glass molding, vertical pulling of glass liquid, etc. It can solve the problems of many bubbles and gas lines in quartz glass tubes, and the quality and specifications cannot meet the technical requirements of semiconductors. Improve melting conditions, increase pressure, and increase the effect of preheating process

Inactive Publication Date: 2010-05-19
徐胜利
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The production method of the quartz glass tube in the prior art can only produce a qualified quartz glass tube with a diameter of about 80 mm and a wall thickness of 4 mm. If a quartz glass tube with a slightly larger diameter is to be pulled out by force, the pulled out quartz glass tube There are many gas bubbles in the glass tube, and its quality and specifications cannot meet the technical requirements of semiconductors

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0013] Example 1. A continuous melting method for producing large-diameter transparent quartz glass tubes for semiconductor technology. The quartz glass raw material, high-purity quartz sand, is put into a continuous melting furnace and melted by electric heating. The tube machine is drawn into a large-diameter transparent quartz glass tube; the high-purity quartz sand is preheated for 200 minutes after the raw material high-purity quartz sand is put into the continuous furnace and before heating and melting, and the high-purity quartz sand is preheated to 750°C , and then heating and melting; the upper part of the tungsten-molybdenum crucible of the continuous melting furnace is a preheating section, and the lower part is a melting section, and the preheating treatment is carried out in the preheating section of the tungsten-molybdenum crucible of the continuous melting furnace; the tungsten-molybdenum crucible of the The diameter is 340mm and the height is 1400mm; the meltin...

Embodiment 2

[0014] Example 2. A continuous melting method for producing large-diameter transparent quartz glass tubes for semiconductor technology. The quartz glass raw material, high-purity quartz sand, is put into a continuous melting furnace and melted by electric heating. The tube machine is drawn into a large-diameter transparent quartz glass tube; the high-purity quartz sand is preheated for 280 minutes after the raw material high-purity quartz sand is put into the continuous furnace and before heating and melting, and the high-purity quartz sand is preheated to 850 °C , and then heating and melting; the upper part of the tungsten-molybdenum crucible of the continuous melting furnace is a preheating section, and the lower part is a melting section, and the preheating treatment is carried out in the preheating section of the tungsten-molybdenum crucible of the continuous melting furnace; the tungsten-molybdenum crucible of the The diameter is 360mm and the height is 1600mm; the melti...

Embodiment 3

[0015] Example 3. A continuous melting method for producing large-diameter transparent quartz glass tubes for semiconductor technology. The quartz glass raw material, high-purity quartz sand, is put into a continuous melting furnace and melted by electric heating. The tube machine is drawn into a large-diameter transparent quartz glass tube; the high-purity quartz sand is preheated for 240 minutes after the raw material high-purity quartz sand is put into the continuous furnace and before heating and melting, and the high-purity quartz sand is preheated to 800°C , and then heating and melting; the upper part of the tungsten-molybdenum crucible of the continuous melting furnace is a preheating section, and the lower part is a melting section, and the preheating treatment is carried out in the preheating section of the tungsten-molybdenum crucible of the continuous melting furnace; the tungsten-molybdenum crucible of the The diameter is 350mm and the height is 1500mm; the meltin...

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Abstract

A continuous method of manufacturing large aperture transparent quartz glass tube for semiconductor technology, which is characterized in that high pure quartz sand of quartz glass material is added in a continuous melting furnace, through electric heating and fusing, fused quartz glass liquid is drew as large aperture transparent quartz glass tubes through a former, a material stage and a tube drawing machine; the high pure quartz sand added in the continuous melting furnace, before heating and fusing, preheating the high pure quartz sand 200-280 minutes to 750-850 DEG C, then heating and fusing; the upper part of the continuous melting furnace tungsten-molybdenum crucible is a preheating section, the lower part is a fusing section, the preheating treatment is processed in the preheatingsection; the diameter of the tungsten-molybdenum crucible is 340-360 mm, height is 1400-1600 mm; the fusing temperature in the continuous melting furnace is 2150-2250 DEG C; the diameter of the formeris 244-264 mm; the current passing through the continuous melting furnace for electric heating molybdenum electrode is 215-225 A, the voltage is 19-20 V. The obtained quartz tube has wide gauge, goodquality, can be fully suitable for semiconductor technical requirement.

Description

technical field [0001] The invention relates to a production method of a quartz glass tube, in particular to a method for producing a large-diameter transparent quartz glass tube for semiconductor technology by continuous melting. Background technique [0002] The production method of the quartz glass tube in the prior art can only produce a qualified quartz glass tube with a diameter of about 80 mm and a wall thickness of 4 mm. If a quartz glass tube with a slightly larger diameter is to be pulled out by force, the pulled out quartz glass tube The glass tube has many gas bubbles, and its quality and specifications cannot meet the technical requirements of semiconductors. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide a new continuous melting method for producing transparent quartz glass tubes for the deficiencies of the prior art. This method can produce transparent quartz glass tubes suitable for semiconductor...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03B20/00C03B5/08C03B15/14
CPCC03B17/04C03B20/00C03B5/1672C03B5/0275
Inventor 徐胜利
Owner 徐胜利
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