Apparatus for low-temperature plasma treatment

Abstract

An apparatus for low-temperature plasma treatment of a continuous length plastic film which can work for surface modifying processing for a film using low-temperature plasma while maintaining the dimensional stability without causing damage to the film. The apparatus for performing surface modifying processing for a film comprises: a first vacuum chamber equipped with an unrolling unit for unrolling a rolled plastic film; a second vacuum chamber in which the unrolled plastic film is subjected to a low-temperature plasma treatment on the surface; and a third vacuum chamber equipped with a winding unit for winding the plasma-treated plastic film into a roll, the vacuum chambers being connected together in series along the running direction of the plastic film under treatment.

Description

technical field [0001] The present invention relates to a low-temperature plasma treatment device for changing the surface properties of various types of plastic films (hereinafter simply referred to as films). Background technique [0002] So far it has been known that by means of low-temperature plasma treatment of the surface of a film, the wettability of the surface can be improved, the coatability of adhesives etc. can be improved, and the adhesion between the film and the adhesive can be improved Sex can be enhanced. [0003] Typically, films are manufactured on in-line equipment and wound into rolls, so the low-temperature plasma treatment of the surface of the roll film is best performed on in-line equipment. [0004] Therefore, use the thin film surface treatment of low-temperature plasma to carry out as shown in Figure 3, the method that uses at this moment is to place plasma treatment device in the inside of vacuum container 16, and sealing roller 17,18 is set in...

AI Technical Summary

Problems solved by technology

[0005] When the device uses a sealing arrangement as shown in Japanese Laid-Open Patent Application No. S57-18737, the film is fed through a series of paired sealing rollers, which enables gaps to be formed between the sealing rollers, as the sealing rollers wear and deteriorate, And other gases different from the processing gas can permeate into the device, so that the sealing is extremely difficult, and the vacuum degree in the vacuum chamber is insufficient, and there will be problems leading to insufficient low temperature plasma processing

[0006] In addition, the film is interposed between opposing seal rollers, so that a heavy load may be applied to the film at the time of unwinding due to wear or deterioration of the seal rollers, the dimensional stability of the film will deteriorate and the film may be damaged or scratched. hurt

[0007] The method of No. H09-209158 Japanese Published Patent Application is to place the unwinding unit and the winding unit in a single vacuum chamber, so that there is no problem caused by the insufficient sealing effect of the sealing drum as shown in the S57-18737 Japanese Published Patent Application, but Since the drive mechanism is placed in the same vacuum chamber, there may be problems with the drive mechanism being damaged by the plasma, or due to the corrosion of the metal by the plasma-activated gas

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