Production instrument for electric arc coating quartz glass crucible and manufacturing technique thereof

Abstract

The invention discloses a device that can increase the inner wall purity and reduce inner wall bubble density for quartz pot, and the production process. It comprises graphite module, quartz feeding bar inside the graphite module, the quartz feeding bar is connected to feeding bottle, the middle part of quartz feeding bar is equipped with rotary joint, and the feeding bottle is provided with vibrating device. The invention employs adjustable electromagnetic vibration and moderates vibration by moderating current to ensure even distribution of high- purity crystal powder in pot, and makes crystal powder be sprayed to different positions in the internal wall of pot by adjusting the rotary joint.

Description

Technical field [0001] The invention relates to the production equipment and the production process of the arc-coated quartz glass crucible. Background technique [0002] At present, the general principle and method of arc quartz glass crucible production: add crystal powder into a high-speed rotating mold, rely on centrifugal force to make the crystal powder adhere to the inner wall of the mold, and make the shape of the crystal powder meet the process requirements after shaping. The crystal powder is then melted into glass by indirect heating with an electric arc. However, its purity and bubble density cannot meet the quality requirements for pulling electronic-grade single crystal products. Contents of the invention [0003] The purpose of the present invention is to provide the production equipment and the manufacturing process of the arc quartz glass crucible which can improve the purity of the inner wall of the quartz glass crucible and reduce the density of bubbles...

AI Technical Summary

Problems solved by technology

However, its purity and bubble density cannot meet the quality requirements for pulling electronic-grade single crystal products.

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