Crystallized glass and method for producing crystallized glass

A technology of glass-ceramic and a manufacturing method, which is applied in the photoengraving process of the pattern surface, the manufacture of semiconductor/solid-state devices, the originals for optical mechanical processing, etc., can solve the problem of poor production efficiency and easy cracking of large-sized molded products , easy to damage, etc.
CN101085698AInactive Publication Date: 2007-12-12OHARA
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
OHARA
Publication Date
2007-12-12
Estimated Expiration
Not applicable · inactive patent

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Abstract

Provided are SiO 2 -Al 2 O 3 -based or Li 2 O-Al 2 O 3 -SiO 2 -based crystallized glass that solves the cause of cracking and fracture in forming it into large-size shaped articles, that has homogeneous inner quality and that may be produced stably at highefficiency; andamethodforproducingit. Thecrystallized glass contains components of SiO 2 and Al 2 O 3 , wherein the crystal precipitation peak temperature width obtained in differential thermal analysis of amorphous glass, a precursor thereof, is at least 22°C. Preferably, the total amount of the TiO 2 component and the ZrO 2 component in the crystallized glass is within a range of from 3.0 to less than 4.3 %.
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Description

technical field

[0001] The present invention relates to SiO 2 -Al 2 o 3 Department or Li 2 O-Al 2 o 3 -SiO 2 A glass-ceramic and a method for producing the same. Relating to a kind of crystallized glass and its manufacturing method, the crystallized glass can be used in a wide range of applications as various precision components that are strictly required to have extremely low expansion characteristics, ultra-smoothness of the surface, or high rigidity, etc. Various components of the next generation semiconductor manufacturing equipment. Background technique

[0002] SiO 2 -Al 2 o 3 Department or Li 2 O-Al 2 o 3 -SiO 2 The glass-ceramics of the system can have, for example, low expansion characteristics (for example, refer to Patent Document 1, Patent Document 2.), and also have, for example, high rigidity, ultra-smoothness of the surface after grinding, etc., which are unique to such glass-ceramics Useful properties.

[0003] On the other hand, SiO 2 -Al ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
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