Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Crystallized glass and method for producing crystallized glass

A technology of glass-ceramic and a manufacturing method, which is applied in the photoengraving process of the pattern surface, the manufacture of semiconductor/solid-state devices, the originals for optical mechanical processing, etc., can solve the problem of poor production efficiency and easy cracking of large-sized molded products , easy to damage, etc.

Inactive Publication Date: 2007-12-12
OHARA
View PDF4 Cites 13 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] On the other hand, SiO 2 -Al 2 o 3 Department or Li 2 O-Al 2 o 3 -SiO 2 In the production of large-sized molded products of glass-ceramics of the glass-ceramic system, there is a problem that cracks are easily generated or easily broken in the process of heat-treating the precursor glass to precipitate crystals or the process of growing crystals in the production process. The production efficiency of large-sized molded products of glass-ceramics is remarkably poor

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Crystallized glass and method for producing crystallized glass
  • Crystallized glass and method for producing crystallized glass
  • Crystallized glass and method for producing crystallized glass

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0116] A preferable form of the glass ceramics of this invention is demonstrated. In addition, unless otherwise specified, each component is expressed in terms of oxides, and the content of each component is expressed in mass % in terms of oxides.

[0117] In this specification, the so-called "in terms of oxides" means that among the components assumed to be used as the composition components of the glass ceramics of the present invention, fluoride components, sulfate components, chloride components, and compound salts other than these are excluded. When the base glass is completely decomposed into oxides at the time of melting, the method of each component contained in the glass ceramics is described. When describing content, each component contained in glass ceramics is described with the oxide total weight converted into an oxide being 100 mass %.

[0118] as SiO 2 -Al 2 o 3 Department or Li 2 O-Al 2 o 3 -SiO 2 One of the characteristics of glass-ceramics of the gla...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
particle diameteraaaaaaaaaa
temperatureaaaaaaaaaa
coefficient of thermal expansionaaaaaaaaaa
Login to View More

Abstract

Provided are SiO 2 -Al 2 O 3 -based or Li 2 O-Al 2 O 3 -SiO 2 -based crystallized glass that solves the cause of cracking and fracture in forming it into large-size shaped articles, that has homogeneous inner quality and that may be produced stably at highefficiency; andamethodforproducingit. Thecrystallized glass contains components of SiO 2 and Al 2 O 3 , wherein the crystal precipitation peak temperature width obtained in differential thermal analysis of amorphous glass, a precursor thereof, is at least 22°C. Preferably, the total amount of the TiO 2 component and the ZrO 2 component in the crystallized glass is within a range of from 3.0 to less than 4.3 %.

Description

technical field [0001] The present invention relates to SiO 2 -Al 2 o 3 Department or Li 2 O-Al 2 o 3 -SiO 2 A glass-ceramic and a method for producing the same. Relating to a kind of crystallized glass and its manufacturing method, the crystallized glass can be used in a wide range of applications as various precision components that are strictly required to have extremely low expansion characteristics, ultra-smoothness of the surface, or high rigidity, etc. Various components of the next generation semiconductor manufacturing equipment. Background technique [0002] SiO 2 -Al 2 o 3 Department or Li 2 O-Al 2 o 3 -SiO 2 The glass-ceramics of the system can have, for example, low expansion characteristics (for example, refer to Patent Document 1, Patent Document 2.), and also have, for example, high rigidity, ultra-smoothness of the surface after grinding, etc., which are unique to such glass-ceramics Useful properties. [0003] On the other hand, SiO 2 -Al ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C03C3/083C03C3/097C03C3/087C03C3/095C03C10/00C03C10/14C03B32/02G03F1/60G03F1/68H01L21/027
CPCC03C10/0027C03C10/0009
Inventor 川岛康之后藤直雪
Owner OHARA
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com