Crystallized glass and method for producing crystallized glass

一种微晶玻璃、制造方法的技术，应用在图纹面的照相制版工艺、半导体/固态器件制造、用于光机械处理的原件等方向，能够解决设备维修成本变大、不现实、制造设备成本变大等问题

CN101085699AInactive Publication Date: 2007-12-12OHARA
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2007-12-12
Estimated Expiration
Not applicable · inactive patent

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Abstract

Provided are SiO 2 -Al 2 O 3 -based or Li 2 O-Al 2 O 3 -SiO 2 -based crystallized glass which has various properties intrinsic to the crystallized glass of the type and which contains an arsenic component or an antimony component in an amount as small as possible or does not contain an arsenic component and an antimony component; and a method for producing the crystallized glass. The crystallized glass contains components of SiO 2 and Al 2 O 3 (as oxides) and contains an SnO 2 component (as oxide) and / or a CeO 2 component (as oxide). Preferably, the glass contains from 0.01 to 5.0 % (as oxide) of an SnO 2 component and / or from 0.01 to 5.0 % (as oxide) of a CeO 2 component.
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Description

technical field

[0001] The present invention relates to SiO 2 -Al 2 o 3 Department or Li 2 O-Al 2 o 3 -SiO 2 A glass-ceramic and a method for producing the same. The present invention relates to a glass-ceramic and a method for producing the same. The glass-ceramic can be preferably used in a wide range of applications as various precision components that are strictly required to have extremely low expansion characteristics, ultra-smoothness of the surface, or high rigidity, and is suitable as a new product. Various components of the next generation semiconductor manufacturing equipment. Background technique

[0002] SiO 2 -Al 2 o 3 Department or Li 2 O-Al 2 o 3 -SiO 2 The glass-ceramics of the system can have, for example, low expansion characteristics (for example, refer to Patent Document 1, Patent Document 2.), and also have, for example, high rigidity, ultra-smoothness of the surface after grinding, etc., which are unique to such glass-ceramics Useful pro...

Examples

Embodiment Construction

[0123] as SiO 2 -Al 2 o 3 Department or Li 2 O-Al 2 o 3 -SiO 2 One of the characteristics of glass-ceramics of the glass-ceramic system is low expansion. This low expansion can be achieved by adding SiO 2 -Al 2 o 3 Department or Li 2 O-Al 2 o 3 -SiO 2 The composition control of the glass-ceramics of the system is obtained for a specific composition. Components used in next-generation lithography technology using EUV light in semiconductor manufacturing require thermal dimensional stability, strength, thermal durability, and chemical stability, and in particular require extremely low expansion necessary for thermal dimensional stability characteristics, and has been studying the use of low expansion, the SiO 2 -Al 2 o 3 Department or Li 2 O-Al 2 o 3 -SiO 2 Glass-ceramics are used in the aforementioned components.

[0124] In addition, SiO 2 -Al 2 o 3 Department or Li 2 O-Al 2 o 3 -SiO 2 One of the characteristics of the glass-ceramics of this type is...