Double quality blocks attune output type silicon MEMS gyroscopes

A dual-mass, output-type technology, applied in the field of inertial navigation systems, can solve the problems of inability to eliminate external acceleration errors, large vibration and noise, etc.

Active Publication Date: 2008-03-05
BEIHANG UNIV
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Problems solved by technology

[0004] The technical problem of the present invention is: to overcome the shortcomings of the existing tuned output silicon MEMS gyroscope, which has large vibration noise and cannot eliminate the error caused by external acceleration, and proposes a dual-mass tuned output silicon MEMS gyroscope

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  • Double quality blocks attune output type silicon MEMS gyroscopes
  • Double quality blocks attune output type silicon MEMS gyroscopes
  • Double quality blocks attune output type silicon MEMS gyroscopes

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Embodiment Construction

[0067] The specific implementation structure of the technical solution of the present invention is shown in Figure 2 and Figure 3, a dual-mass tuned output silicon MEMS gyroscope is mainly composed of a fixed tooth 101, a movable tooth 102, a first mass 1, a second mass 7. Composed of the first outer frame 3, the second outer frame 6, levers 41, 42, 51, 52 and two tuning fork resonators 81, 82. The fixed teeth 101 and the movable teeth 102 constitute capacitive plates. The first mass 1 and the second mass 7 are embedded with comb-shaped movable teeth, which have the same structure. phase vibration, the first mass block 1 is connected to the first outer frame 3 through four inner folded beams 11, 12, 13, 14, and the second mass block 7 is connected to the On the second outer frame 6, considering the power consumption and sensitivity of the gyroscope, the natural frequency of the two mass blocks along the Y axis is designed to be 1000-10000 Hz. In this embodiment, the natural fr...

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Abstract

The gyroscope comprises: fixed teeth, movable teeth, two mass blocks, two outer frames, two pairs of leavers and two tuning fork resonators. The first mass block and second mass block are respectively connected to the first outer frame and second outer frame through four infolding beams; two outer frames are respectively secured on the anchor point through the outer supporting beam; two outer frames are connected through a pair of folding beams; both right and left sides of the first outer frame are connected to the free end of two tuning fork resonators via the opposite direction force amplifying leaver; the both right and left sides of the outer frame are connected to the free end of two tuning fork resonators via the same direction force amplifying leaver; by testing the resonance frequency of tuning fork resonator at both ends, calculating the rotating speed inputted from outside.

Description

technical field [0001] The invention relates to a dual-mass tuning output silicon MEMS gyroscope, which can be applied to the navigation and control of micro-miniature systems, and can be applied to the inertial navigation system of tactical weapons with short working time, low cost and large dynamic range. Background technique [0002] The gyroscope is an inertial speed sensor that can be used to measure the angular velocity of the carrier. The IMU (Inertial Measurement Unit) composed of three gyroscopes and three accelerometers can provide position and attitude information for the carrier. It is widely used Applied in the field of inertial navigation. Since the late 1980s, with the development of MEMS (Micro-Electromechanical System, micro-electromechanical system) technology, various sensors have been miniaturized. Compared with traditional mechanical and optical gyroscopes, gyroscopes based on MEMS technology As far as the instrument is concerned, it has the advantages ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/56G01C21/18G01P9/04B81B7/02G01C19/5621
Inventor 房建成李建利盛蔚楚中毅秦杰乙冉冉宋星
Owner BEIHANG UNIV
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