Gas-adsorbing substance, gas-adsorbing alloy and gas-adsorbing material

A technology of gas adsorption and solid matter, applied in other chemical processes, chemical instruments and methods, etc., can solve the problems of increasing energy consumption and unusable manufacturing.
CN101146608BActive Publication Date: 2012-08-15PANASONIC CORP +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
PANASONIC CORP
Publication Date
2012-08-15

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Abstract

A gas-adsorbing substance which comprises Li and a solid substance having a hardness of 5 or higher and adsorbs at least nitrogen or oxygen at 25 DEG C under an ordinary pressure; a gas adsorbing alloy, characterized in that it comprises at least two types of metal forming no intermetallic compound with one another, the enthalpy of mixing of the above two types of metal is larger than 0, and at least parts of the above two types of metal dissolve with each other; and a gas-adsorbing material which comprises the above gas-adsorbing substance and the above gas adsorbing alloy.
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Description

technical field

[0001] The present invention relates to a gas-adsorbing material, a gas-adsorbing alloy, and a gas-adsorbing material containing the gas-adsorbing material and / or gas-adsorbing alloy (hereinafter collectively referred to as "gas-adsorbing material, etc."). Background technique

[0002] Gas-adsorbing substances and the like are used in various fields such as vacuum maintenance, removal of trace gases in rare gases, and removal of gases in fluorescent lamps.

[0003] Rare gases used in the semiconductor manufacturing industry are expected to be purified to high purity by removing nitrogen, hydrocarbons, carbon monoxide, carbon dioxide, oxygen, hydrogen, water vapor, etc. in the rare gases. In particular, it is difficult to remove nitrogen, which is a stable molecule.

[0004] As a conventional method for removing nitrogen or hydrocarbons in a rare gas, for example, there is a method of contacting a getter material of a ternary alloy composed of zirconium, vana...

Claims

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