Method for regulating magnetic levitation vacuum molecular pump rotor dynamic balance

Abstract

The invention discloses a method for adjusting dynamic balance of a rotor of a magnetic suspension vacuum molecular pump, which particularly comprises fist, detecting an actual vibrating signal of a rotor which is obtained by a sensor directly from a rotor of a magnetic bearing, second, collecting rotor speed and phase signal, third, doing an isolating process of direct current composition to the vibrating signal of the rotor which is obtained, fourth, doing a real-time filtering process to the vibrating signal according to the rotor speed, obtaining vibrating signals with the same frequency of the rotor, fifth, finishing corresponding dynamic balance algorism in post period by utilizing a dynamic balancing device or an observation system which is operated in a magnetic suspension vacuum molecular pump, and doing a dynamic balance to the rotor according to the result of the dynamic balance algorism, sixth, repeating the steps untill the rotor achieves a needed dynamic balancing accuracy. The method of the invention has the advantages of high accuracy of a vibrating value which is collected, high dynamic balance accuracy, and balancing behavior of the rotor is completely consistent with the final actual operating behavior, which is beneficial for simplifying dynamic balancing equipment.

Description

technical field [0001] The invention relates to a method for adjusting the dynamic balance of a rotor of a magnetic levitation vacuum molecular pump. Background technique [0002] Modern machines are developing towards high-speed, high-efficiency, high-precision and large-scale. In rotating machinery, the problem of rotor vibration has become a relatively prominent technical problem, and has an important impact on the life, reliability, operating performance and working environment of the machine. The rotor imbalance caused by uneven material, uneven temperature, processing and installation errors, and structural reasons is the most important excitation source of rotor vibration. Dynamic balance is to determine the size and position of the rotor imbalance by measuring the rotor vibration and a certain balance algorithm, and reduce the imbalance by adding or removing weight at the corresponding position. Dynamic balance is an effective means to reduce the vibration of the ro...

AI Technical Summary

Problems solved by technology

[0006] Aiming at the problems existing in the prior art, the object of the present invention is to provide a method for adjusting the dynamic balance of the rotor of the magnetic levitation vacuum molecular pump, which overcomes the problems of low balance precision and low balance speed in offline dynamic balance, and the machine The problem that the dynamic balance method cannot directly measure the rotor vibration

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