Advanced chemical mechanical polishing system with smart endpoint detection
A boundary point and workpiece fixture technology, applied in grinding/polishing equipment, control of workpiece feed motion, manufacturing tools, etc., can solve problems such as difficulty in reducing thickness and plane shape, and achieve optimization of polishing, saving time and cost. Effect
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[0067] As described below, the present invention provides a method and system for in-situ boundary point detection using a material removal method such as CMP. The description is given below with reference to the drawings, and the same reference numerals in the drawings represent the same components.
[0068] A. Boundary point detection system
[0069] figure 2 An exemplary chemical mechanical polishing (CMP) apparatus 100 is shown, which includes a polishing element 102 and a carriage 104. The polishing element can be a polishing belt, a polishing pad, or other types of polishing elements. The polishing element 102 includes an upper or processed surface 106 and a bottom surface 108. The bottom surface 108 of the polishing element is tensioned on a support plate 109 such as a pressing plate. The polishing element and the bracket are arranged such that the surface of the workpiece abuts the polishing element, that is, the surface of the workpiece can be very close to or contact t...
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