The invention discloses a bonding agent for bonding aluminum
nitride ceramics and a bonding method, and belongs to the technical field of electrostatic chucks, and the bonding agent comprises the following components in parts by weight: 1.5-5.5 wt% of B2O3, 40-55 wt% of CaO, 40-55 wt% of AI2O3, an
organic solvent, a dispersant and a binder. The bonding method comprises the steps that a first aluminum
nitride sintered body and a second aluminum
nitride sintered body which are bonded are prepared, the bonding face of the first aluminum nitride sintered body and the bonding face of the second aluminum nitride sintered body need to be machined firstly,
alcohol serves as a
cleaning agent, and ultrasonic cleaning is conducted for 30 min or above; the preparation method comprises the following steps: respectively weighing B2O3, CaO and AI2O3 according to a ratio, putting the weighed B2O3, CaO and AI2O3 together with an
organic solvent, a dispersant and a binder into a ball milling tank, and carrying out ball milling for 4-6 hours to form a binding agent; the bonding agent is uniformly coated on the bonding surface of the first aluminum nitride sintered body and the second aluminum nitride sintered body, the thickness of the bonding agent is 90-110 [mu] m, bonding is carried out, the load of 10 kg / cm < 2 > is applied,
nitrogen is filled at the temperature of 1200 DEG C for
atmosphere protection, the bonding temperature is 1400-1800 DEG C, and the bonding time is 20-50 min.