Compound cathode foil and solid electrolytic capacitor comprising same
A composite cathode and solid-state electrolysis technology, applied in the field of electrode foil, can solve the problems of poor mass production efficiency and long time, and achieve good compatibility and bonding, excellent high temperature oxidation resistance, high wear resistance and adhesion sexual effect
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Example Embodiment
[0025] [Example 1]
[0026] In this embodiment, a cathode arc plasma (cathode arc plasma) coating method is used, a flat aluminum foil is used as a substrate, titanium and graphite are used as targets, and inert gas and hydrocarbon-containing compounds (Hydrocarbon) are introduced during the preparation process. gas. Under the condition of 20~100℃, the pressure of the preparation process is set to 10 -4 ~2Pa, and apply a bias voltage of 0V~-500V. First, a titanium metal layer is grown on a flat aluminum substrate. Then, a titanium carbide layer is grown on the titanium metal layer. Finally, a carbon layer is grown on the titanium carbide layer to complete an aluminum / titanium / titanium carbide / carbon composite electrode structure. The thickness of the carbon layer in the composite structure is about 288 nm, and the thickness of the titanium metal layer and the titanium carbide layer is about 10-100 nm.
[0027] Preparation of solid electrolytic capacitor of the present invention...
Example Embodiment
[0029] [Example 2]
[0030] As in Example 1, but using zirconium instead of titanium as the metal target, an aluminum / zirconium / zirconium carbide / carbon composite electrode structure was fabricated. The thickness of the coating in the composite structure was about 430nm. The zirconium metal layer and the zirconium carbide The thickness of the layer is about 10-100 nm.
[0031] The preparation method of the solid electrolytic capacitor is the same as in Example 1, but the cathode foil is replaced with an aluminum / zirconium / zirconium carbide / carbon composite structure. The measured capacitance of the solid electrolytic capacitor is listed in Table 1, and the frequency is 120Hz and 100kHz. The test results of its equivalent series resistance (ESR) are listed in Table 2.
Example Embodiment
[0032] [Example 3]
[0033] As in Example 1, but using chromium instead of titanium as the metal target, an aluminum / chromium / chromium carbide / carbon composite electrode structure was fabricated. The thickness of the coating in the composite structure was about 430nm. The chromium metal layer and chromium carbide The thickness of the layer is about 10-100 nm.
[0034] The preparation method of the solid electrolytic capacitor is the same as in Example 1, but the cathode foil is replaced with an aluminum / chromium / chromium carbide / carbon composite structure. The measured capacitance of the solid electrolytic capacitor is listed in Table 1.
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