High precision six-axis laser measurement device and measurement method

Abstract

The invention relates to a high-precision six-axis laser measurement device and a method thereof. The device comprises a laser interferometer system, a workbench and a motor execution system. The laser interferometer system comprises three laser interferometers vertically arranged along x-axis and used for measuring the displacement of the workbench along three vertical three axes (Z, Theta x, Theta y), two laser interferometers arranged along x-axis and used for measuring the displacement X of the workbench along x-axis and a rotor rotation angle Theta z, a laser interferometer arranged along y-axis and used for measuring the displacement Y of the workbench along y-axis. The workbench is connected with the motor execution system via a washer and driven by the motor execution system to perform spatial six-axis displacement. The invention has the advantages of high measurement precision, low error, and strong generality; and is suitable for calibration of non-contact type and contact type displacement sensors, and calibration of the displacement accuracy of the multi-axis motor executor.

Description

technical field [0001] The invention belongs to the field of high-precision measurement, in particular to a high-precision six-axis laser interferometry device and a measurement method thereof. Background technique [0002] At present, laser interferometry has been widely used in high-precision position measurement, which has the characteristics of high precision, strong reliability, and small error interference. It is especially used in photolithography systems and silicon wafer alignment in the integrated circuit industry. More mature laser measurement devices generally use single-parameter measurement, but in many high-precision measurement occasions, there are many parameters that need to be determined, which cannot meet the application requirements, so a multi-axis measurement system is required. [0003] The six-axis measurement system can measure the three linear motions and three rotations of the measured object in real time. The research on its measurement method a...

AI Technical Summary

Problems solved by technology

The existing high-precision multi-degree-of-freedom measurement device is realized by modifying the laser optical path. The optical path layout is relatively complicated, which puts forward high requirements on the manufacturing accuracy and installation accuracy of optical devices, and the measurement accuracy is affected by environmental factors. more interference

At the same time, because laser interferometry requires the measurement surface to have high reflectivity and smoothness, the versatility of the measurement device is greatly limited.

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