Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Method and device for detecting optical element laser damage threshold

A technology of laser damage threshold and detection device, which is used in measurement devices, fluorescence/phosphorescence, material analysis by optical means, etc., can solve the problems of unspecified discrimination methods, inability to visually observe the morphology of the irradiated area online, and achieve sensitivity high effect

Active Publication Date: 2010-06-16
CHINA INSTITUTE OF ATOMIC ENERGY
View PDF2 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The above five methods for judging damage all have the disadvantage of not being able to visually observe the morphology of the irradiated area online.
In Liu Qiang, Lin Libin, Zu Xiaotao, Gan Rongbing, Intense Laser Radiation Damage Discrimination Method, Laser Journal, 2002, 23(4), it is mentioned in the article that when the component is opaque, observe whether the surface of the component produces fluorescence on the incident side of the laser It is possible to judge the damage of optical components, but the specific method and device for the judgment are not described in this article

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method and device for detecting optical element laser damage threshold
  • Method and device for detecting optical element laser damage threshold

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0016] Such as figure 1 As shown, the KrF laser (1) emits a laser with a pulse width of 24 ns, uniformly irradiates the area with a diameter of 2 mm on the surface of the ultraviolet optical element (6) to be tested at an incident angle of 0°, and the lens group f 1 , f 2 The uniformly distributed cross-sectional image of the beam is transmitted to the front surface of the ultraviolet optical element (6) to be tested, and the laser light excites the fluorescent spot on the surface of the intact ultraviolet optical element, and passes through the lens f 2 , f 3 The composed fluorescence microscope is magnified by 3 times and imaged on the CCD array detector (8) to observe the changes on the surface of the ultraviolet optical element (6) to be tested, and to judge whether the ultraviolet optical element (6) to be tested is damaged. The laser energy output by the KrF laser (1) is attenuated by the energy attenuator (3) and reflected by the spectrometer (5) by 10% to the energy ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a laser damage threshold detection method of optical component and a relative device, which utilizes the laser generated by a laser device to radiate on the surface of an objectoptical component to generate fluorescent light, to detect the surface morphology change of the optical component, wherein the laser device is KrF laser, and the invention detects the distortion of surface fluorescent light strength distribution on the optical surface to detect the surface morphology change of the optical component. The invention can directly detect damage generation and develop,with wide application for surface damage online tests on ultraviolet optical component and high sensitivity.

Description

technical field [0001] The invention belongs to a method for detecting the damage of an optical element, in particular to a method and a device for detecting the laser damage threshold of an ultraviolet optical element by using a KrF laser to irradiate the surface of an ultraviolet optical element to excite fluorescence imaging. Background technique [0002] In a high-power laser system, there are a large number of optical components, and the ability of these optical components to resist light damage is closely related to the normal operation of the system. The generation of damage will lead to the degradation of beam quality, the thermal effect at the damage point may cause the explosion of optical components, and the diffraction of the beam at the damage point will cause damage to other optical components. The radiation damage of optical components is the result of the interaction between components and strong laser light. An important indicator for judging the quality of ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/64G01N21/958
Inventor 高智星汤秀章向益淮
Owner CHINA INSTITUTE OF ATOMIC ENERGY
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com