Three-axis stepping motor control platform

A stepper motor and control platform technology, applied in the direction of electrical program control, digital control, circuit, etc., can solve the problems of large restrictions and high cost, and achieve the effect of complete functions, high positioning accuracy and low cost

Inactive Publication Date: 2008-08-20
HEFEI ADVANTOOLS SEMICON
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0003] Combined with the automation transformation project of wafer detection equipment, and aiming at the disadvantages of high cost and large limitatio

Method used

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  • Three-axis stepping motor control platform

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Embodiment Construction

[0023] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0024] Figure 1 shows the structural principle block diagram of the system, from which it can be seen that the entire control platform is divided into 5 parts:

[0025] ARM processor part: This part also includes external RAM and external Flash. The external RAM stores temporary data during operation, and the external Flash is used to store the running code of ARM. The ARM communicates with the host through the RS232 interface and receives control commands from the control computer. ARM communicates with the microscope for wafer inspection through another RS232 interface, sends control commands to the microscope, and controls the conversion of the diaphragm and eyepiece of the microscope. ARM is connected to FPGA through 16 data lines and 8 address lines, and exchanges data with FPGA.

[0026] FPGA part: There are several motion control registers inside the FPGA. ...

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Abstract

The three-axis stepping motor control platform disclosed in the invention is used for position controlling of wafer detection microscope three-axis. The device comprises ARM treater, scene programmable logical gate array FPGA, stepping motor driver, hand grip control module and grating ruler for feedback X, Y, Z shafts stepping motor position. The scene programmable logical gate array FPGA has X, Y, Z shafts sport parameter register, position feedback register and other control register. The ARM treater obtains control command from control computer through communication line, codes and decodes the control command into controlling parameter needed by FPGA and configures in corresponding control register in FPGA, and the FPGA detects the variation value in the control register and drives each shaft stepping motor operation according to given values. The stepping motor control platform overcomes the limits caused by using special purpose stepping motor by adapting combined control policy of ARM and FPGA, brings great spreading space for user quadric exploiture and enhancing the control stabilizing ability.

Description

technical field [0001] The invention relates to a three-axis stepping motor control platform, which is used to control the three-axis positions of a microscope used for wafer detection to realize the automation of wafer detection. Background technique [0002] Wafer inspection equipment is used to inspect wafer products after photolithography. The wafer inspection equipment has undergone three-axis electronic control transformation, and with the special wafer inspection software, it can realize functions such as auto focus and automatic inspection. The human factor in the detection can be minimized, which not only liberates manpower, but also greatly improves the detection accuracy. At present, the control strategy used in the three-axis stepping motor control platform mostly adopts the scheme of microprocessor and foreign special stepping motor control chip. The solution of using a dedicated stepper motor control chip simplifies the design and also brings a problem, that ...

Claims

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Application Information

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IPC IPC(8): G05B19/414H01L21/00
Inventor 黄福光苟成全
Owner HEFEI ADVANTOOLS SEMICON
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