Magnetic head for perpendicular magnetic recording and magnetic disk drive
A technology of perpendicular recording and magnetic head, which is applied in the direction of magnetic recording head, magnetic recording, orthogonal magnetization magnetic head, etc., and can solve the problems of non-suppression and increased noise
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no. 1 example
[0065] 1 is a plan view showing an example of the internal structure of a magnetic disk drive according to an embodiment of the present invention, in which the relationship between a magnetic head and a magnetic disk is clearly shown.
[0066] In FIG. 1 , in a housing 10 , a rotary actuator 11 supports a cantilever 12 , and a slider 13 is fixed on the top end of the cantilever 12 . The slider 13 is fixed to the top end of the boom 12 via a support tool called a ginbal, which is omitted in FIG. 1 . A magnetic head element portion 14 described below is mounted on an end portion of the slider 13 .
[0067] The magnetic head element portion 14 records (writes) / plays (reads) information on / from a magnetic disk 15 (magnetic recording medium), which rotates counterclockwise in FIG. 1 . Here, the arrows in FIG. 1 indicate the direction of rotation of the magnetic disk 15 .
[0068] The magnetic head element section 14 includes a perpendicular recording head whose write shield is arr...
example 1
[0112] 8A to 8E are principal cross-sectional views showing Example 1 of the steps of forming the main magnetic pole according to the first embodiment of the present invention. Each step is described below with reference to these drawings.
[0113] First, as shown in FIG. 8A, Al 2 o 3 The magnetic layers constituting the main magnetic pole are stacked and grown on the film in the order of materials in which the saturation magnetic flux density Bs decreases. Specifically, these magnetic layers are composed of a first magnetic layer 42, a second magnetic layer 43, and a third magnetic layer 44. The first magnetic layer 42 is made of FeNi equivalent to a saturation magnetic flux density Bs=1.0T (composition of Fe= 70wt% to 80wt%) and has a thickness of 20nm to 50nm, the second magnetic layer 43 is made of FeNi (Fe composition = 80wt% to 90wt%) equivalent to the saturation magnetic flux density Bs = 2.1T and has a thickness of 150nm To a thickness of 200nm, the third magnetic l...
example 2
[0122] 9A to 9D are principal sectional views showing Example 2 of the steps of forming the main magnetic pole according to the first embodiment of the present invention. Here, the same reference numerals as in FIGS. 1 , 2 , 3A, and 3B denote the same parts or have the same functions. Each step is described below with reference to these drawings.
[0123] First, as shown in FIG. 9A, by applying the sputtering method on Al as an inorganic insulating film 2 o 3 The first magnetic layer 52 is formed on the film 51 with a thickness of 20 nm to 50 nm. The first magnetic layer 52 is made of FeNi (composition of Fe=80 wt% to 90 wt%) equivalent to a saturation magnetic flux density Bs=1.0T, and serves as a base film for performing a plating method.
[0124] Then, a resist film 53 is formed on the first magnetic layer 52 by applying a resist process in photolithography. An opening 53A is patterned in the resist film 53 , the opening 53A is used to form an inverted trapezoidal main ...
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Abstract
Description
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