De-coupling capacitance circuit

Abstract

A decoupling capacitor circuit comprises a plurality of deep trench capacitors serially connected with one another and a plurality of push-pull circuits. The decoupling capacitor circuit utilizes the push-pull circuits to control the step voltage of each deep trench capacitor, so as to ensure that the step voltage cannot be affected by the defect (leakage current) of the deep trench capacitors or the bias of parasitic elements.

Description

technical field [0001] The invention relates to a decoupling capacitor circuit, in particular to a high voltage decoupling capacitor circuit realized by a deep groove capacitor. Background technique [0002] With the rapid development of science and technology, people have higher and higher requirements for the integration degree and functions of dies. Generally, the power of the die uses a gate oxide capacitor as a power de-coupling capacitor for the power supply. However, since the gate oxide capacitor occupies a relatively large die area, it does not meet the current high-integration requirements. Contents of the invention [0003] In view of the above problems, an object of the present invention is to provide a decoupling capacitor circuit, which can reduce the excessive die area occupied by the gate oxide capacitor. [0004] An embodiment of the present invention provides a decoupling capacitor circuit. The decoupling capacitor circuit includes a plurality of deep ...

AI Technical Summary

Problems solved by technology

However, since the gate oxide capacitance will occupy a large die area, it does not meet the requirements of today's high integration.

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