Liquid showerhead based on piezo-electricity socle girder
A liquid spray head and cantilever beam technology, which is applied to liquid spray devices, spray devices, etc., can solve the problems of reducing the size of the micro channel, the limitation of the width of the micro channel, and obstruction, and achieves increasing the amount of liquid spray, reducing the driving voltage, The effect of improving integration
Inactive Publication Date: 2008-09-24
刘淑芹
View PDF0 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
The width of the microchannels in one direction is limited when forming higher density arrays of liquid ejectors
Therefore, the amount of liquid ejection is affected, and the driving method of this nozzle prevents further reducing the size of the microchannel and improving the integration of the nozzle.
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0034] The liquid spray head based on the piezoelectric cantilever beam drive provided by the present invention can be realized in a variety of structures. figure 1 , Figure 4 , Figure 5 Three possible implementation structures are illustrated separately. Their common feature is that the piezoelectric cantilever beam containing the piezoelectric film layer and its upper and lower electrodes is located on the upper part of the liquid microchannel or in the channel, and acts as a liquid ejection driver in the microchannel. The piezoelectric cantilever beam produces deflection deformation under the excitation of the voltage, and drives the liquid in the micro channel to be ejected from the micro nozzle. figure 1 , Figure 4 , Figure 5 All shown can be regarded as a schematic diagram of the structure of an array liquid jet head.
[0035] in figure 1 In the first structural schematic diagram shown, it is composed of an orifice plate 100, a substrate 200 and an upper substrate 300....
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention relates to a liquid nozzle based on a piezoelectric curved cantilever realized by adopting a micro-processing method, and belongs to the microelectronic mechanical field. The liquid nozzle mainly comprises the piezoelectric curved cantilever, a micro-channel and a micro-spraying hole. The piezoelectric curved cantilever with a piezoelectric film layer as well as an upper electrode and a lower electrode of the piezoelectric film layer is positioned at the upper part of the micro-channel or in the micro-channel, and is used as a drive for liquid ejection micro-channel. The micro-spraying hole corresponding to the micro-channel on the substrate of the micro-channel is arranged on a spray plate; the piezoelectric curved cantilever positioned at the upper part of the micro-channel or in the micro-channel, the spraying hole and the micro-channel form a liquid spraying mechanism; the deflecting deformation of the piezoelectric curved cantilever is caused due to the driving of voltage, therefore, the liquid in the micro-channel is driven to spray out of the micro-spraying hole. The piezoelectric curved cantilever of the nozzle can achieve greater deformation, can run at lower voltage and reduce the area of a liquid drive and the size of micro-channel, therefore, the liquid nozzle with more spraying holes is provided.
Description
Technical field [0001] The invention belongs to the field of microelectronic machinery, and particularly relates to a liquid spray head based on a piezoelectric cantilever realized by a micromachining method. Background technique [0002] The most common, extensive and typical applications of liquid jet heads and liquid jet devices are inkjet printing, graphics, image recording and printing, printing and dyeing and other fields. It is also widely used in various displays such as liquid crystal display, organic light-emitting display, and other micro-manufacturing aspects such as biochips. The liquid ejection head based on the piezoelectric effect has the characteristics of controllable droplet size, controllable ejection speed, easy to achieve high-precision droplet ejection, and long service life of the ejection head, which is an important direction for the development of liquid ejection devices. [0003] The cost of liquid jet heads made by piezoelectric principles is relativel...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): B05B17/04
Inventor 刘淑芹
Owner 刘淑芹