Method and system for factory automation system

A factory automation and transportation system technology, applied in the direction of comprehensive factory control, comprehensive factory control, general control system, etc., can solve the problems that cannot fully meet such needs, and achieve the effect of reducing traffic and ensuring transportation

Active Publication Date: 2008-10-08
TAIWAN SEMICON MFG CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] While existing systems and methods may meet the general

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  • Method and system for factory automation system
  • Method and system for factory automation system
  • Method and system for factory automation system

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Embodiment Construction

[0055] In order to make the above and other objects, features, and advantages of the present invention more comprehensible, preferred embodiments are listed below and described in detail in conjunction with the accompanying drawings.

[0056] The present invention will be described in detail through the following examples, but it is not intended to limit the present invention. Anyone skilled in the art can make some changes and modifications to obtain the application without departing from the spirit and scope of the present invention. Different characteristics or various modified embodiments of the invention. The similar symbols and characters in the multiple embodiments of the present invention and the drawings are only used for assistance and convenience of description, and do not represent any specific relationship between the various embodiments discussed.

[0057] FIG. 1 shows a schematic diagram of a wafer fabrication plant 100 according to an embodiment of the present ...

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Abstract

In one aspect a factory automation system for a wafer fab is provided. The factory automation system comprises: a manufacturing execution system for providing lot information; a material control system for providing dynamic traffic information; an automated material handling system for providing static route information; and a real-time dispatching system to select a destination and a route for a wafer carrier in response to a transfer request. In another aspect a method of transferring a wafer lot within a wafer fabrication facility using a factory automation system is provided. The method comprises: receiving a transfer request to move the wafer lot from a first position to a second position within the fab; obtaining lot information, dynamic traffic information, and static traffic information; using the information to select a route between the first position and the second position; and executing the transfer using the selected route.

Description

technical field [0001] The present invention relates to a factory automation system and related methods, in particular to a system and method for realizing factory automation in a wafer manufacturing plant. Background technique [0002] The manufacture of semiconductor devices involves the performance of a series of manufacturing steps. These manufacturing steps are completed in a specific order and usually within a specific period of time using various high-tech products and measuring equipment. The main function of the wafer material flow system in a wafer manufacturing plant (or "fab") is to transfer wafers to each device at the correct time point, and to track the position and status of wafers throughout the manufacturing process. [0003] Automated material handling systems (AMHS) are used in wafer fabs to perform automated functions more efficiently, consistently, and safely than can be accomplished by manual means. Although the progress of semiconductor dimensions fr...

Claims

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Application Information

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IPC IPC(8): G05B19/418H01L21/00H01L21/677
CPCG05B19/41895G05B2219/45031G06Q10/047G05B2219/31002G05B2219/31276Y02P90/02Y02P90/60
Inventor 黄志伟陈蕙怡游仁祈游志源
Owner TAIWAN SEMICON MFG CO LTD
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