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Ultrasonic cleaning device and method

A cleaning device and ultrasonic technology, applied in cleaning methods and utensils, cleaning methods using liquids, chemical instruments and methods, etc., can solve the problems of different cleaning effects, reduced cleaning effects, inability to achieve uniform and high-efficiency cleaning, etc. Efficient cleaning and effect of suppressing unevenness

Inactive Publication Date: 2008-10-15
SAE MAGNETICS (HK) LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] However, in the above-mentioned conventional examples, since the intensity of ultrasonic waves generated by the ultrasonic vibrating element varies according to the shape and arrangement of the ultrasonic vibrating element, it is still Uniform and efficient cleaning cannot be achieved
For example, the technology disclosed in Japanese Patent No. 3641383 has the problem that the distance between the ultrasonic vibration element and the object to be cleaned is relatively long in some places due to the shaking of the ultrasonic vibration element, thereby reducing the cleaning effect.
In addition, in the technology disclosed in Japanese Patent Application Laid-Open No. 5-50047, since the ultrasonic vibrating element is arranged in the direction extending along the radius of the rotating stage, the cleaning effect on the inner peripheral side and the outer peripheral side is different, and, Since there are fewer vibrating elements, there will be a problem that uniform and efficient cleaning cannot be achieved

Method used

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  • Ultrasonic cleaning device and method
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  • Ultrasonic cleaning device and method

Examples

Experimental program
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Embodiment 1

[0044] The first embodiment of the present invention will be described in detail below with reference to FIG. 1 to FIG. 9 . Fig. 1 is the schematic diagram representing the structure of ultrasonic cleaning device; And figure 2 is an explanatory diagram showing its operation. image 3 9 to 9 are explanatory diagrams showing the arrangement of ultrasonic vibration elements and the intensity of ultrasonic vibration.

[0045] structure

[0046] As shown in Figure 1, the ultrasonic cleaning device of this embodiment includes a cleaning tank 1 that can accommodate a cleaning solution 10, a cleaning object support seat 3 (cleaning object support unit) that supports an object to be cleaned 31 and immerses it in the cleaning solution 10 And a vibrating device 2 (vibration applying means) for applying ultrasonic vibration to the cleaning liquid 10 in the cleaning tank 1 . Wherein, the cleaning liquid 10 may be pure water, isopropanol, butane, neutral detergent and the like. In addi...

Embodiment 2

[0063] The following will combine Figure 10 to Figure 15 A second embodiment of the present invention will be described. The structure of the ultrasonic cleaning device of this embodiment is basically the same as that of the above-mentioned embodiment 1, except that the structure of the ultrasonic vibrating element 22 is different.

[0064] first, Figure 10 (a) shows a method of taking the distance D from the center C of the ultrasonic vibration element 22 . Figure 10 (b), (c), and (d) show energy changes of ultrasonic vibration elements having various frequency characteristics corresponding to different distances D. FIG. In addition, each graph shows each distance from the vibrating element to the vertical direction. Furthermore, Figure 11 Shown is the vibration intensity S at a distance Dmm from the center C of the ultrasonic vibration element 22 having a diameter of 45 mm. Figure 12 (a) shows the relationship between the vibration energy and the frequency radiated...

Embodiment 3

[0070] The following will combine Figure 16 and Figure 17 A third embodiment of the present invention will be described. Such as Figure 16 As shown, the structure of the ultrasonic cleaning device of the present embodiment is basically the same as that of the ultrasonic cleaning device in the above-mentioned embodiment 1. In the embodiment 1, the object support base 3 has a movable structure, and in the present embodiment, the vibration The device 2 has a movable structure.

[0071] Specifically, such as Figure 16 As shown, the same as the above-mentioned embodiment, the driving device 6 is designed, and the driving device 6 is used to drive the vibrating device 2 with the ultrasonic vibration element 22, and the controller 5 is also installed, and the controller 5 is used to control the driving device 6 to drive The driving state of the vibration device 2. And, the driving device 6 makes the vibrating device 2 Figure 17 Movable in at least one direction in the thre...

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Abstract

The invention provides an ultrasonic cleaning device capable of symmetrically and efficiently cleaning the articles to be cleaned to further improve quality of the cleaned articles and lower the cost. The ultrasonic cleaning device comprises a cleaning trough for accommodating cleaning solution, a cleaned article support unit for supporting the cleaned articles and immersing the articles in the cleaning solution, and an oscillation applying unit for applying ultrasonic oscillation to the cleaning solution within the cleaning trough. The oscillation applying unit includes a planar oscillation plate, a plurality of ultrasonic oscillation elements that are regularly arranged on the oscillation plate; the cleaned article support unit includes a support surface where the plurality of cleaned articles can be placed in parallel and which supports these cleaned articles opposite to the oscillation plate; the device also comprises a movable unit making the oscillation applying unit and / or the cleaned article support unit movable, such that the oscillation plate and the support surface oppositely moves in parallel. Moreover, the invention also provides an ultrasonic cleaning method using the ultrasonic cleaning device.

Description

technical field [0001] The invention relates to an ultrasonic cleaning device, in particular to an ultrasonic cleaning device which utilizes ultrasonic vibration energy radiated into a cleaning liquid to clean stains attached to objects to be cleaned. Background technique [0002] Electronic components made of semiconductor chips and small precision components require high cleanliness depending on their application, so they need to be cleaned after manufacture and before shipment as a product or assembly into a device. For example, for a magnetic disk, it is necessary to assemble a low-flying magnetic head slider into the magnetic disk device, so it is required to have a high degree of cleanliness, and it is a component that requires high positioning accuracy, so it must be cleaned. [0003] Ultrasonic cleaning apparatuses have been used conventionally as apparatuses for cleaning the above-mentioned electronic components and the like. The so-called ultrasonic cleaning is to...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B3/12
Inventor 吉田利信
Owner SAE MAGNETICS (HK) LTD