Silicon capacitor microphone

A technology of microphones and silicon capacitors, applied in the field of microphones, can solve the problems of limited increase in the rear cavity, difficulty in manufacturing silicon microphone products, and increased product height.
CN101296530AActive Publication Date: 2008-10-29WEIFANG GOERTEK MICROELECTRONICS CO LTD
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Patent Information

Authority / Receiving Office
CN ยท China
Current Assignee / Owner
WEIFANG GOERTEK MICROELECTRONICS CO LTD
Publication Date
2008-10-29

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Abstract

The invention discloses a silicon capacitor microphone which comprises a first circuit board provided with an external bonding pad, a second circuit board arranged on the first circuit board vertically, an MEMS acoustic chip arranged on the second circuit board, an internal sound hole which can act on the MEMS acoustic chip by sound waves and is arranged on the second circuit board on the position of the MEMS acoustic chip, a shell which is adhered to the first circuit board and the second circuit board and forms two sealed cavities, an external sound hole arranged on the external wall of one or two of the sealed cavities for receiving external audio signals, and an electron component arranged on the first circuit board or / and the second circuit board. Therefore, the volume of the back cavity of the silicon capacitor microphone is increased to a large extent, the area of the silicon capacitor microphone is reduced greatly, the installation positions of the internal parts of the silicon capacitor microphone are more flexible, and the functions of a directional microphone can be realized easily on the base of the structure.
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Description

technical field

[0001] The invention relates to a microphone, in particular to a silicon condenser microphone with a new packaging structure. Background technique

[0002] In recent years, with the continuous reduction in volume and higher performance of electronic products such as mobile phones and notebooks, the supporting electronic components are also required to be continuously reduced in size and improved in performance and consistency. In this context, many new products have been launched in the field of microphone products as one of the important parts, and the silicon condenser microphone, which is realized in batches using semiconductor manufacturing and processing technology, is the representative product among them. The key design content of the silicon condenser microphone is the packaging technology, and the cost ratio of the packaging is relatively high. Therefore, there have been many patents on the packaging technology of the silicon condenser microphone rec...

Claims

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