Plane light integrated reconfigurable optical add-drop multiplexer

An optical add-drop multiplexer, planar light technology, applied in wavelength division multiplexing systems, optical waveguides and light guides, etc., can solve the problems of non-repeatable optical add-drop multiplexers, practical and economic limitations, channel reorganization, etc. Achieve the effect of being suitable for mass production, compact device structure and high detection accuracy

Inactive Publication Date: 2008-11-12
陈谷红 +1
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Problems solved by technology

[0003] Most of the existing optical add-drop multiplexers are made of discrete micro-optical components. The add-drop frequency or wavelength is fixed, and its channels cannot be reconfigured according to the requirements of the communication system. They are non-reconfigurable Optical add-drop multiplexers, in other words, optical signals of different add-drop frequencies or wavelengths need to be equipped with optical add-drop multiplexers with different optical path structures, so their practicability and economy are limited

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specific Embodiment approach

[0039] The processing technology of the present invention adopts the multi-layer wafer semiconductor processing technology and technology of silicon-based deposition of silicon dioxide and sputtered metal film, such as figure 1 As shown, it consists of a waveguide optical core (1), a gasket (2), a silicon-based wafer (3), a cover cladding layer (4), a heating layer (5), a conductive layer (6), a protective layer (7) and A deep etching groove (8) is formed, and the process steps are as follows: in the first step, a chemical vapor deposition method is used to deposit a liner (2) and a waveguide optical core (1) on the silicon-based wafer (3); in the second step , using reactive ion etching technology to form the designed planar waveguide optical path; the third step, on the liner (2) and the waveguide optical core (1), re-deposit silicon dioxide to cover the cladding (4); the fourth step , using a metal film sputtering process to generate a heating layer (5) and a conductive lay...

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Abstract

The invention relates to the technical field of optic-electronic integrated devices, which proposes a reconfigurable optical add/drop multiplexer integrated by plane light on the basis of plane light wave guide technology and is manufactured by adopting silicon-based silica deposition and the multi-layer silicon wafer processing technique and technology of semi-conductor sputtered with a metal membrane. An integrated optic-electronic circuit is composed of a dense light-wave division multiplexer/ a multiplexer, an optical add/drop channel, an array light switch, an adjustable light attenuator and an optical detector. The device not only has compact structure, high integration degree, small volume, light weight, stable and reliable performance, but also has mature and stable manufacturing technique, high production efficiency and low cost, is suitable for mass production and applicable to the long-distance artery transmission networks, annular metropolitan area networks and local access networks of optical communication systems, can realize online update of the network equipment of systems without interrupting service capacity expansion and has economical networking and flexible configuration.

Description

technical field [0001] The invention relates to a plane optical integrated reconfigurable optical add-drop multiplexer (ROADM), which belongs to the technical field of integrated optoelectronic devices. Background technique [0002] An optical add / drop multiplexer is a composite device that usually includes a wavelength division multiplexer / multiplexer, an optical switch, an optical attenuator and an optical detector. The existing manufacturing technologies can be roughly divided into discrete micro-optical component technology, micro-electromechanical system (MEMS) technology, and planar optical waveguide (PLC) technology. Discrete micro-optical elements are usually large in size, and an optical add-drop multiplexer made of a single discrete micro-optical element after compounding has large losses and high production costs. The optical add-drop multiplexer manufactured by MEMS and planar optical waveguide technology is suitable for the needs of the integration and modular ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/12H04J14/02
Inventor 陈谷红管桦
Owner 陈谷红
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