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Method for manufacturing organic el element

A technology of electroluminescence element and manufacturing method, which is applied in the direction of electric element, electric solid device, final product manufacturing, etc., and can solve problems such as the manufacture of organic EL elements that have not been explained

Inactive Publication Date: 2008-11-26
TOYOTA IND CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the above-mentioned publication does not describe the manufacture of this organic EL element

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  • Method for manufacturing organic el element
  • Method for manufacturing organic el element
  • Method for manufacturing organic el element

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no. 1 example

[0042] The first embodiment has the following advantages.

[0043] (1) In the step of forming the transparent electrode 12 , the substrate mark 13 is formed on the transparent substrate 11 simultaneously with the transparent electrode 12 . Substrate mark 13 is formed of the same material as transparent electrode 12 . Each substrate mark 13 is formed at a predetermined position on the transparent substrate 11 . The substrate mark 13 functions as an alignment mark for adjusting the position of the shadow mask 14 relative to the transparent substrate 11 . Therefore, a special step of forming the substrate mark 13 is not required, thereby reducing the number of steps.

[0044] (2) In the step of aligning the shadow mask 14 with the transparent substrate 11 , the transparent substrate 11 is disposed above the shadow mask 14 . An irradiation light source 16 as a white light source and a plurality of filters 17 are provided. Each filter 17 has a transmission wavelength of a diffe...

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Abstract

A method that manufactures organic electroluminescence (EL) element, wherein a substrate mark (13) is formed on a transparent substrate (11) as an alignment mark. The substrate mark (13) is formed at the same time as transparent electrodes (12) are formed on the transparent substrate (11). The substrate mark (13) is formed of the same material as the transparent electrodes (12). A center wavelength of a transmission wavelength of a plurality of optical filters (17) is different from each other. An optical filter (17) corresponding to a thickness of the substrate mark is selected from a plurality of optical filters (17). Light is irradiated from a white light source (16) to the substrate mark (13) via the selected optical filter (17). Accordingly, the substrate mark (13) is recognized and a shadow mask (14) is aligned with the transparent substrate (11).

Description

Background of the invention [0001] The present invention relates to a method of manufacturing an organic EL element (EL: Electroluminescence). The manufacturing method includes a step of forming a transparent electrode on a transparent substrate, a step of aligning a shadow mask with the transparent substrate after the electrode is formed, and laminating an organic layer on the transparent electrode by depositing after the alignment. EL layer steps. [0002] Recently, attention has been focused on organic electroluminescence elements which are self-luminous light-emitting elements. A basic method of manufacturing an organic EL element includes: a step of preparing a glass substrate on which an anode as a transparent electrode is patterned; and a step of laminating an organic EL layer and a cathode on the glass substrate. The organic EL layer has a laminated structure including a hole transport layer, a light emitting layer and an electron transport layer. A hole injection l...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/82H01L21/68H01L51/56C23C14/04C23C16/04
CPCH01L51/56H01L51/0011C23C14/042Y02E10/549Y02P70/50H10K71/166H10K77/10H10K71/00
Inventor 曾根宏隆大国寿夫吉野公彦
Owner TOYOTA IND CORP